Modeling and measuring the transport and scattering of energetic debris in an extreme ultraviolet plasma source

John R. Sporre; Daniel T. Elg; Kishor K. Kalathiparambil; David N. Ruzic

doi:10.1117/1.JMM.15.1.013503

5 February 2016 Modeling and measuring the transport and scattering of energetic debris in an extreme ultraviolet plasma source

John R. Sporre, Daniel T. Elg, Kishor K. Kalathiparambil, David N. Ruzic

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 1, 013503 (February 2016). https://doi.org/10.1117/1.JMM.15.1.013503

Abstract

A theoretical model for describing the propagation and scattering of energetic species in an extreme ultraviolet (EUV) light lithography source is presented. An EUV light emitting XTREME XTS 13-35 Z-pinch plasma source is modeled with a focus on the effect of chamber pressure and buffer gas mass on energetic ion and neutral debris transport. The interactions of the energetic debris species, which is generated by the EUV light emitting plasma, with the buffer gas and chamber walls are considered as scattering events in the model, and the trajectories of the individual atomic species involved are traced using a Monte Carlo algorithm. This study aims to establish the means by which debris is transported to the intermediate focus with the intent to verify the various mitigation techniques currently employed to increase EUV lithography efficiency. The modeling is compared with an experimental investigation.

Citation Download Citation

John R. Sporre, Daniel T. Elg, Kishor K. Kalathiparambil, and David N. Ruzic "Modeling and measuring the transport and scattering of energetic debris in an extreme ultraviolet plasma source," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(1), 013503 (5 February 2016). https://doi.org/10.1117/1.JMM.15.1.013503

Published: 5 February 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available