Production and measurement of superpolished surfaces

Johannes van Wingerden; Hans Jan Frankena; Bertram A. van der Zwan

doi:10.1117/12.56151

1 May 1992 Production and measurement of superpolished surfaces

Johannes van Wingerden, Hans Jan Frankena, Bertram A. van der Zwan

Author Affiliations +

Optical Engineering, Vol. 31, Issue 5, (May 1992). https://doi.org/10.1117/12.56151

Abstract

The influence of polishing time on the roughness of ultrasmooth bowl-feed-polished surfaces is studied. A large improvement of the surface quality is obtained within the first 10 mm, but increasing the polishing time from 10 to 60 mm did not yield a significant difference. A Linnik interference miscroscope, adapted for phase-shifting interferometry, was used for roughness measurements. Preliminary measurements have been performed with a setup determining the scattered intensity within a small solid angle. This relatively simple setup, which is also suitable for uncoated glass surfaces, clearly showed the improvement of surface quality by bowl-feed polishing.

Citation Download Citation

Johannes van Wingerden, Hans Jan Frankena, and Bertram A. van der Zwan "Production and measurement of superpolished surfaces," Optical Engineering 31(5), (1 May 1992). https://doi.org/10.1117/12.56151

Published: 1 May 1992

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE