Scanning laser vibrometer for dynamic study of small features

Bryan Kok Ann Ngoi; Krishnan Venkatakrishnan

doi:10.1117/1.1313054

1 November 2000 Scanning laser vibrometer for dynamic study of small features

Bryan Kok Ann Ngoi, Krishnan Venkatakrishnan

Optical Engineering, Vol. 39, Issue 11, (November 2000). https://doi.org/10.1117/1.1313054

The laser Doppler vibrometer (LVD) has been the favorite instrument for precision dynamics measurement due to its noncontact nature, high accuracy, and high resolution. However, LDV can give only the dynamic data of a particular locate on the entire feature. To acquire the whole field data, a laser beam scanning mechanism must be implemented. Currently, a motor-driven scanning mirror is used to move the measurement probe from one point to another, and the mechanical vibrations of the scanning mirror reduce the measurement accuracy. We introduce a novel scanning LDV optical system embodying an acoustooptic deflector scanning mechanism, which can improve the measurement accuracy since there is no mechanical motion involved. One main advantage of this system is that it generates laser scanning in parallel, which is different from the beam scanning in a conventional scanning LDV. Promising results are obtained from the preliminary experiments carried out for measurement of a hard disk suspension.

Citation Download Citation

Bryan Kok Ann Ngoi and Krishnan Venkatakrishnan "Scanning laser vibrometer for dynamic study of small features," Optical Engineering 39(11), (1 November 2000). https://doi.org/10.1117/1.1313054

Published: 1 November 2000

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available