Profilometer for measuring superfine surfaces

Zhaofei Zhou; Weidong Zhou; Wenjie Li

doi:10.1117/1.1387994

1 August 2001 Profilometer for measuring superfine surfaces

Zhaofei Zhou, Weidong Zhou, Wenjie Li

Optical Engineering, Vol. 40, Issue 8, (August 2001). https://doi.org/10.1117/1.1387994

An interference profilometer for measuring the microprofile of superfine surfaces is described. It has a stabilized He-Ne laser light source with two longitudinal modes and two coaxial interference arms. The measuring arm is focused on the sample surface to form a small spot while the reference arm forms a large spot. As a result, the reference arm provides a constant signal and only the measuring arm will be sensitive to the irregularity of the microprofile. Mechanical vibration has a very small effect on the instrument performance. Even if vibration amplitudes reach 300 nm, the measurement noise is less than 1 nm. The instrument has a vertical resolution better than 0.2 Å root mean square (rms) and smallest form error among existing coaxial profilometers. It is well suited for measuring the microstructure on photoetched surfaces.

©(2001) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Zhaofei Zhou, Weidong Zhou, and Wenjie Li "Profilometer for measuring superfine surfaces," Optical Engineering 40(8), (1 August 2001). https://doi.org/10.1117/1.1387994

Published: 1 August 2001

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