Fourier transform method for measurement of thin film thickness by speckle interferometry

Canan Karaalioglu; Yani Skarlatos

doi:10.1117/1.1572498

1 June 2003 Fourier transform method for measurement of thin film thickness by speckle interferometry

Canan Karaalioglu, Yani Skarlatos

Optical Engineering, Vol. 42, Issue 6, (June 2003). https://doi.org/10.1117/1.1572498

The surface profile of an Al thin film and its thickness are observed by electronic speckle pattern interferometry (ESPI). The Michelson interferometer is used as our basic interferometric system to obtain interference fringes on a CCD camera. These interference fringes depend on the path differences due to the surface contours of the thin film. The interference fringes are analyzed with the fast Fourier transform method and a wrapped phase is obtained. An unwrapping procedure is used to obtain a continuous phase. Results on thickness measurement are presented.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Canan Karaalioglu and Yani Skarlatos "Fourier transform method for measurement of thin film thickness by speckle interferometry," Optical Engineering 42(6), (1 June 2003). https://doi.org/10.1117/1.1572498

Published: 1 June 2003

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