Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement

Caini Zhang; Xiangzhao Wang

doi:10.1117/1.1810141

1 December 2004 Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement

Caini Zhang, Xiangzhao Wang

Author Affiliations +

Optical Engineering, Vol. 43, Issue 12, (December 2004). https://doi.org/10.1117/1.1810141

Abstract

We propose a sinusoidal phase-modulating laser diode interferometer for measuring small angular displacement. The interferometer is based on a Fabry-Perot plate. It has a simple structure and is insensitive to external disturbance. Sinusoidal phase-modulating interferometry is used for improving the measurement accuracy. A charge-coupled device (CCD) image sensor is used for measuring the distance between the reflected beams from two faces of the Fabry-Perot plate. From the distance, the initial angle of incidence is calculated. Compared with Michelson interferometers and autocollimators, this interferometer has the advantage of compact size and simple structure. The numerical calculation and experimental results verify the usefulness of this novel interferometer.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Caini Zhang and Xiangzhao Wang "Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement," Optical Engineering 43(12), (1 December 2004). https://doi.org/10.1117/1.1810141

Published: 1 December 2004

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE