Effect of annealing on the structural and UV photoluminescence properties of Sb-doped SnO2 films deposited on Al2O3 (0001) substrates by RF magnetron sputtering

Xianjin Feng; Yi Luo; Caina Luan

doi:10.1117/1.OE.53.11.117111

1 December 2014 Effect of annealing on the structural and UV photoluminescence properties of Sb-doped SnO₂ films deposited on Al₂O₃ (0001) substrates by RF magnetron sputtering

Xianjin Feng, Yi Luo, Caina Luan

Author Affiliations +

Optical Engineering, Vol. 53, Issue 11, 117111 (December 2014). https://doi.org/10.1117/1.OE.53.11.117111

Abstract

The antimony-doped tin oxide (SnO₂∶Sb) films have been deposited on the Al₂O₃ (0001) substrates by RF magnetron sputtering. The influence of annealing on the structural and photoluminescence (PL) properties of the SnO₂∶Sb films was investigated. The prepared samples were polycrystalline films having a rutile structure of pure SnO₂ and a preferred orientation along the (110) direction, with an improvement in the film crystallinity observed after annealing. An ultraviolet PL peak near 334 nm was observed at room temperature both before and after annealing. The corresponding PL mechanism was discussed in detail.

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Xianjin Feng, Yi Luo, and Caina Luan "Effect of annealing on the structural and UV photoluminescence properties of Sb-doped SnO₂ films deposited on Al₂O₃ (0001) substrates by RF magnetron sputtering," Optical Engineering 53(11), 117111 (1 December 2014). https://doi.org/10.1117/1.OE.53.11.117111

Published: 1 December 2014

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