Zoom into picometer: a picoscale equivalent phase-difference-generating method for testing heterodyne interferometers without ultraprecision stages

Di Chang; Jianing Wang; Pengcheng Hu; Jiubin Tan

doi:10.1117/1.OE.58.6.064101

5 June 2019 Zoom into picometer: a picoscale equivalent phase-difference-generating method for testing heterodyne interferometers without ultraprecision stages

Di Chang, Jianing Wang, Pengcheng Hu, Jiubin Tan

Author Affiliations +

Optical Engineering, Vol. 58, Issue 6, 064101 (June 2019). https://doi.org/10.1117/1.OE.58.6.064101

Abstract

A simple and low-budget method aiming to generate phase difference equivalent to picoscale-measured displacements of heterodyne interferometers is proposed. By changing the length of an interference arm in an interferometer-like optical configuration, a small phase difference between the two wavelengths is generated for creating the same effect as a picoscale-measured displacement of the heterodyne interferometer. It is derived and experimentally demonstrated that the zoom factor, defined as the ratio of displacements in a heterodyne interferometer and the proposed method leading to the same phase difference, is proportional to the beat frequency and generally in a scale of 10^− 9. Thus, instead of ultraprecision piezo-stages, only a commercial linear guide rail is equipped in the method, and rigorous vibrating isolation is not necessary. The method has been already used to evaluate signal-processing electronics of a heterodyne grating interferometer.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

Citation Download Citation

Di Chang, Jianing Wang, Pengcheng Hu, and Jiubin Tan "Zoom into picometer: a picoscale equivalent phase-difference-generating method for testing heterodyne interferometers without ultraprecision stages," Optical Engineering 58(6), 064101 (5 June 2019). https://doi.org/10.1117/1.OE.58.6.064101

Received: 7 March 2019; Accepted: 15 May 2019; Published: 5 June 2019

ACCESS THE FULL ARTICLE

JOURNAL ARTICLE
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY