Dr. Aaron Stein Profile

Dr. Aaron Stein

Research Associate at Brookhaven National Lab

SPIE Involvement:

Author

Publications (25)

Proceedings Article | 12 November 2024 Poster + Paper

Poster + Paper

All-dry zinc-imidazolate resists for electron beam and EUV lithography

Kayley Waltz, Patrick Eckhert, Peter Corkery, Mueed Ahmad, Andrea Kraetz, Yurun Miao, Dennis Lee, Mohammed Abdel-Rahman, Yucheng Lan, Paul Haghi-Ashtiani, Aaron Stein, J. Anibal Boscoboinik, Michael Tsapatsis, D. Howard Fairbrother

Proceedings Volume 13215, 132151D (2024) https://doi.org/10.1117/12.3050172

KEYWORDS: Extreme ultraviolet lithography, Silicon, Electron beam lithography, Photoresist processing, Lithography, Metals, Atomic layer deposition, Semiconducting wafers, Electron beams

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Proceedings Article | 9 April 2024 Presentation + Paper

Presentation + Paper

Amorphous zinc-imidazolate all-dry resists

Kayley Waltz, Patrick Eckhert, Peter Corkery, Mueed Ahmad, Andrea Kraetz, Yurun Miao, Dennis Lee, Mohammed Abdel-Rahman, Yucheng Lan, Paul Haghi-Ashtiani, Aaron Stein, J. Anibal Boscoboinik, Michael Tsapatsis, D. Howard Fairbrother

Proceedings Volume 12957, 129570H (2024) https://doi.org/10.1117/12.3010916

KEYWORDS: Etching, Electron beam lithography, Plasma etching, Lithography, Photoresist developing

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Proceedings Article | 13 March 2024 Presentation + Paper

Presentation + Paper

CW room temperature operation of the GaSb-based photonic crystal surface emitting diode lasers

L. Shterengas, W. Lee, R. Liu, A. Stein, G. Kipshidze, G. Belenky

Proceedings Volume 12905, 1290506 (2024) https://doi.org/10.1117/12.3001052

KEYWORDS: Photonic crystals, Design, Continuous wave operation, Heterojunctions, Semiconductor lasers, Polarization, Gallium antimonide, Diodes

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Proceedings Article | 30 April 2023 Presentation

Presentation

Advancing the capabilities of polymer blend directed self-assembly

Gregory Doerk, Aaron Stein, Suwon Bae, Marcus Noack, Masafumi Fukuto, Ashish Kulkarni, Kristof Toth, Chinedum Osuji, Kevin Yager

Proceedings Volume PC12497, PC124970I (2023) https://doi.org/10.1117/12.2660507

KEYWORDS: Directed self assembly, Polymers, X-rays, X-ray microscopy, Scattering, Scanning electron microscopy, Resolution enhancement technologies, Nanostructures, Lithography, Grazing incidence

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Proceedings Article | 30 April 2023 Presentation

Presentation

Hybrid positive-tone resist synthesis via vapor phase infiltration for contact-hole patterning

Nikhil Tiwale, Ashwanth Subramanian, Won-Il Lee, Ming Lu, Aaron Stein, Jiyoung Kim, Chang-Yong Nam

Proceedings Volume 12498, 124981A (2023) https://doi.org/10.1117/12.2658659

KEYWORDS: Optical lithography, Oxides, Metals, Polymer thin films, Nanolithography, Nanocomposites, Materials processing, Lithography, Extreme ultraviolet lithography, Extreme ultraviolet

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Proceedings Article | 30 April 2023 Presentation

Presentation

Atomic layer deposition derived organic-inorganic hybrid EUV photoresists

Ashwanth Subramanian, Dan Le, Su Min Hwang, Nikhil Tiwale, Won-Il Lee, Kim Kisslinger, Ming Lu, Aaron Stein, Jiyoung Kim, Chang-Yong Nam

Proceedings Volume 12498, 1249810 (2023) https://doi.org/10.1117/12.2658685

KEYWORDS: High volume manufacturing, Extreme ultraviolet lithography, Atomic layer deposition, Photoresist materials, Electron beam lithography, Thin films, Silicon, Resistance, Polymethylmethacrylate, Photoresist processing

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Proceedings Article | 11 November 2022 Presentation

Presentation

EUVL characteristics of indium-oxide-infiltrated PMMA hybrid photoresist synthesized by vapor-phase infiltration

Ashwanth Subramanian, Nikhil Tiwale, Won-Il Lee, Kim Kisslinger, Ming Lu, Aaron Stein, Jiyoung Kim, Chang-Yong Nam

Proceedings Volume PC12292, PC122920L (2022) https://doi.org/10.1117/12.2643226

KEYWORDS: Extreme ultraviolet lithography, Polymethylmethacrylate, Photoresist materials, Silicon, Resistance, Indium oxide, Etching, Electron beam lithography, Dry etching, Plasma

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Proceedings Article | 13 June 2022 Presentation

Presentation

Infiltration synthesis: paving way for uniquely functional hybrids and direct-writing optoelectronic nanostructures

Nikhil Tiwale, Ashwanth Subramanian, Kim Kisslinger, Ming Lu, Aaron Stein, Chang-Yong Nam

Proceedings Volume PC12054, PC120540G (2022) https://doi.org/10.1117/12.2618064

KEYWORDS: Nanostructures, Optoelectronics, Thin films, Thin film devices, Polymers, Polymer thin films, Photoresist materials, Oxides, Optoelectronic devices, Microelectromechanical systems

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Proceedings Article | 4 March 2022 Presentation + Paper

Presentation + Paper

Electrically pumped epitaxially regrown [lambda] > 2 µm GaSb-based photonic crystal surface-emitting lasers

Leon Shterengas, R. Liu, G. Kipshidze, A. Stein, Wonjae Lee, Dmitri Zakharov, Kim Kisslinger, Gregory Belenky

Proceedings Volume 12021, 120210B (2022) https://doi.org/10.1117/12.2615741

KEYWORDS: Photonic crystals, Semiconductor lasers, Quantum wells, Etching, Electroluminescence, Gallium antimonide, Transmission electron microscopy

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Proceedings Article | 22 February 2021 Presentation

Presentation

Diversifying the patterning landscape in block copolymer self-assembly

Gregory Doerk, Aaron Stein, Ashish Kulkarni, Kevin Yager

Proceedings Volume 11610, 116100M (2021) https://doi.org/10.1117/12.2584446

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Proceedings Article | 22 February 2021 Presentation + Paper

Presentation + Paper

Hybrid resist synthesis by ex-situ vapor-phase infiltration of metal oxides into conventional organic resists

Nikhil Tiwale, Ashwanth Subramanian, Guillaume Freychet, Eliot Gann, Kim Kisslinger, Ming Lu, Aaron Stein, Jiyoung Kim, Chang-Yong Nam

Proceedings Volume 11612, 116120A (2021) https://doi.org/10.1117/12.2583908

KEYWORDS: Etching, Oxides, Metals, Extreme ultraviolet, Resistance, Optical lithography, Silicon, Scanning transmission electron microscopy, Plasma etching, Nanolithography

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Proceedings Article | 23 March 2020 Presentation + Paper

Presentation + Paper

Infiltration synthesis of hybrid nanocomposite resists for advanced nanolithography

Nikhil Tiwale, Ashwanth Subramanian, Kim Kisslinger, Ming Lu, Jiyoung Kim, Aaron Stein, Chang-Yong Nam

Proceedings Volume 11326, 113260J (2020) https://doi.org/10.1117/12.2552164

KEYWORDS: Etching, Electron beam lithography, Extreme ultraviolet lithography, Polymethylmethacrylate, Atomic layer deposition

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Proceedings Article | 9 March 2020 Presentation

Presentation

The GaSb-based Y-branch DBR and photonic crystal lasers (Conference Presentation)

Leon Shterengas, Jiang Jiang, Takashi Hosoda, Aaron Stein, Alexey Belyanin, Ruiyan Liu, Wonjae Lee, Gela Kipshidze, Gregory Belenky

Proceedings Volume 11301, 113011M (2020) https://doi.org/10.1117/12.2548623

KEYWORDS: Photonic crystals, Laser crystals, Mid-IR, Laser applications, Difference frequency generation, Reflectors, Quantum wells

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SPIE Journal Paper | 14 September 2017 Open Access

Open Access

External cavity cascade diode lasers tunable from 3.05 to 3.25 μm

Meng Wang, Takashi Hosoda, Leon Shterengas, Gela Kipshidze, Ming Lu, Aaron Stein, Gregory Belenky

OE, Vol. 57, Issue 01, 011012, (September 2017) https://doi.org/10.1117/12.10.1117/1.OE.57.1.011012

KEYWORDS: Semiconductor lasers, Quantum wells, Laser damage threshold, Quantum cascade lasers, Reflectivity, Waveguide lasers, Heterojunctions, Aluminum, Continuous wave operation, Waveguides

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Proceedings Article | 8 September 2015 Paper

Paper

Temperature and magnetic-field driven dynamics in artificial magnetic square ice

Sophie Morley, Aaron Stein, Mark Rosamond, Diego Alba Venero, Aleš Hrabec, Philippa Shepley, Mi-Young Im, Peter Fischer, Matthew Bryan, Dan Allwood, Paul Steadman, Sean Langridge, Christopher Marrows

Proceedings Volume 9551, 95511Q (2015) https://doi.org/10.1117/12.2189320

KEYWORDS: Magnetism, Electroluminescent displays, X-ray microscopy, X-rays, Microscopy, Magneto-optics, Temperature metrology, X-ray imaging, Statistical modeling, Mechanics

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Proceedings Article | 17 September 2014 Paper

Paper

Kinoform lens focusing of high-energy x-rays (50 - 100 keV)

S. Shastri, K. Evans-Lutterodt, R. Sheffield, A. Stein, M. Metzler, P. Kenesei

Proceedings Volume 9207, 920704 (2014) https://doi.org/10.1117/12.2062635

KEYWORDS: Computer generated holography, X-rays, Silicon, X-ray optics, Etching, Signal attenuation, Chromium, Semiconducting wafers, Diffraction, Zone plates

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Proceedings Article | 7 March 2014 Paper

Paper

Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography

W. Li, D. Patel, C. Menoni, A. Stein, W. Chao, E. Anderson, M. Marconi

Proceedings Volume 8973, 89730D (2014) https://doi.org/10.1117/12.2041688

KEYWORDS: Photomasks, Lithography, Nanostructures, Nanolithography, Extreme ultraviolet lithography, Extreme ultraviolet, Imaging systems, Nanoimprint lithography, Photoresist materials, X-ray optics

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Proceedings Article | 27 September 2013 Paper

Paper

Coherent nanopatterning with table-top soft x-ray lasers

W. Li, V. Martinez Esquiroz, D. Patel, L. Urbanski, C. Menoni, J. Rocca, A. Stein, W. Chao, E. Anderson, M. Marconi

Proceedings Volume 8849, 88490W (2013) https://doi.org/10.1117/12.2024472

KEYWORDS: Photomasks, Lithography, Nanolithography, Nanostructures, X-ray lasers, Photoresist materials, Extreme ultraviolet, Coherence imaging, Printing, Imaging systems

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Proceedings Article | 20 September 2007 Paper

Paper

Effect of x-ray beamline optics on x-ray photon correlation spectroscopy experiments

A. Sandy, K. Evans-Lutterodt, K. Fezzaa, S. Kim, S. Narayanan, M. Sprung, A. Stein

Proceedings Volume 6705, 67050N (2007) https://doi.org/10.1117/12.734397

KEYWORDS: X-rays, Computer generated holography, Speckle, Mirrors, X-ray optics, Solids, Laser scattering, Scattering, Speckle pattern, Sensors

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Proceedings Article | 15 November 2005 Paper

Paper

Kinoform lenses: toward nanometer resolution

Aaron Stein, Kenneth Evans-Lutterodt, Ashley Taylor

Proceedings Volume 6002, 600210 (2005) https://doi.org/10.1117/12.631188

KEYWORDS: Lenses, Computer generated holography, Lens design, Absorption, Silicon, Etching, Zone plates, Phase shifts, Hard x-rays, Electron beam lithography

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Proceedings Article | 19 January 2005 Paper

Paper

From microchannels to nanochannels in a bilayer resist

Leonidas Ocola, Aaron Stein

Proceedings Volume 5592, (2005) https://doi.org/10.1117/12.572068

KEYWORDS: Diffusion, Photoresist processing, Photoresist materials, Polymers, Photomicroscopy, Plasma etching, Plasma, Electron beam lithography, Scanning electron microscopy, Nanomaterials

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Proceedings Article | 4 November 2004 Paper

Paper

Hard x-ray Fresnel prisms: properties and applications

James Ablett, Kenneth Evans-Lutterodt, Aaron Stein

Proceedings Volume 5539, (2004) https://doi.org/10.1117/12.560323

KEYWORDS: Prisms, X-rays, Hard x-rays, Silicon, Wavefronts, X-ray imaging, Synchrotrons, Phase shifts, Synchrotron radiation, X-ray optics

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Proceedings Article | 4 November 2004 Paper

Paper

Imaging with single-dimension kinoform lenses

Aaron Stein, James Ablett, Kenneth Evans-Lutterodt, Ashley Taylor, Fred Klemens, Avi Kornblit, Sean Polvino

Proceedings Volume 5539, (2004) https://doi.org/10.1117/12.560307

KEYWORDS: Computer generated holography, Lenses, Silicon, Lens design, Zone plates, Etching, Absorption, Phase shifts, Lithography, Hard x-rays

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Proceedings Article | 4 November 2004 Paper

Paper

Energy-dependent focusing properties of a kinoform Fresnel lens

Kenneth Evans-Lutterodt, James Ablett, Aaron Stein, Donald Tennant, Fred Klemens, Ashley Taylor

Proceedings Volume 5539, (2004) https://doi.org/10.1117/12.560296

KEYWORDS: Computer generated holography, Photons, Zone plates, Fresnel lenses, X-rays, Absorption, Hard x-rays, Phase shifts, X-ray optics, Solids

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Proceedings Article | 20 December 2001 Paper

Paper

Scanning transmission soft x-ray microscopy at beamline X-1A at the NSLS: advances in instrumentation and selected applications

Michael Feser, Tobias Beetz, Chris Jacobsen, Janos Kirz, Sue Wirick, Aaron Stein, Thorsten Schaefer

Proceedings Volume 4506, (2001) https://doi.org/10.1117/12.450955

KEYWORDS: Iron, Sensors, X-ray microscopy, X-rays, Microscopes, Phase contrast, Oxides, Image segmentation, Absorption, X-ray imaging

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Showing 5 of 25 publications

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