Dr. Abhinandan Nath Profile

Dr. Abhinandan Nath

at Mentor, a Siemens Business

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Publications (1)

Proceedings Article | 20 March 2020 Presentation + Paper

Real-time full-wafer design-based inter-layer virtual metrology

Lianghong Yin, John Sturtevant, Alberto Lopez Gomez, Shumay Shang, Young Chang Kim, Kostas Adam, Marko Chew, Abhinandan Nath, Boris Habets, Manuela Gutsch, Philip Groeger

Proceedings Volume 11325, 1132507 (2020) https://doi.org/10.1117/12.2551082

KEYWORDS: Semiconducting wafers, Data modeling, Overlay metrology, Metals, Metrology, Critical dimension metrology, Databases, Inspection, Computer simulations, Scanners

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