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Prof. Alexander Metel
at Moscow State Univ of Technology "STANKIN"
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 1 August 2021 Poster + Paper
Combined processing of optical parts through surface polishing with a beam of fast argon atoms and deposition of nanostructured protective films by magnetron target sputtering
Proceedings Volume 11802, 118020V (2021) https://doi.org/10.1117/12.2594368
KEYWORDS: Ions, Polishing, Surface finishing, Plasma, Argon, Sputter deposition, Etching
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