Prof. Alexandre V. Tishchenko Profile

Prof. Alexandre V. Tishchenko

at Univ Lyon

SPIE Involvement:

Author

Publications (28)

Proceedings Article | 16 March 2016 Paper

Paper

Verification and application of multi-source focus quantification

J.-G. Simiz, T. Hasan, F. Staals, B. Le-Gratiet, W. Tel, C. Prentice, J.-W. Gemmink, A. Tishchenko, Y. Jourlin

Proceedings Volume 9781, 97810S (2016) https://doi.org/10.1117/12.2219143

KEYWORDS: Scanners, Design for manufacturability, Manufacturing, Product engineering, Reticles, Visualization, Image resolution, Chemical mechanical planarization, Sensors, Time metrology, Data modeling, Semiconducting wafers, Optical lithography, Performance modeling, Photomasks

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Proceedings Article | 4 September 2015 Paper

Paper

Product layout induced topography effects on intrafield levelling

J.-G. Simiz, T. Hasan, F. Staals, B. Le-Gratiet, W. Tel, C. Prentice, A. Tishchenko

Proceedings Volume 9661, 96610R (2015) https://doi.org/10.1117/12.2194079

KEYWORDS: Scanners, Semiconducting wafers, Polonium, Logic, Sensors, Printing, Photomasks, Electroluminescent displays, Product engineering, Optical lithography

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Proceedings Article | 19 March 2015 Paper

Paper

Predictability and impact of product layout induced topology on across-field focus control

J.-G. Simiz, T. Hasan, F. Staals, B. Le-Gratiet, P. Gilgenkrantz, A. Villaret, F. Pasqualini, W. Tel, C. Prentice, A. Tishchenko

Proceedings Volume 9424, 94241C (2015) https://doi.org/10.1117/12.2085283

KEYWORDS: Semiconducting wafers, Scanners, Sensors, Data modeling, Finite element methods, Silicon, Wafer-level optics, Convolution, Photomasks, Chemical mechanical planarization

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Proceedings Article | 31 March 2014 Paper

Paper

Fast integral rigorous modeling applied to wafer topography effect prediction on 2x nm bulk technologies

J.-C. Michel, J.-C. Le Denmat, A. Tishchenko, Y. Jourlin

Proceedings Volume 9052, 905223 (2014) https://doi.org/10.1117/12.2045899

KEYWORDS: Semiconducting wafers, Global system for mobile communications, Optical lithography, Photomasks, Finite-difference time-domain method, Computer simulations, Silicon, Lithography, Wafer-level optics, Optical proximity correction

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Reflection by wafer topography and underlying layers during optical lithography can cause unwanted overexposure in the resist [1]. In most cases, the use of bottom anti reflective coating limits this effect. However, this solution is not always suitable because of process complexity, cost and cycle time penalty, as for ionic implantation lithography process in 28nm bulk technology. As a consequence, computational lithography solutions are currently under development to simulate and correct wafer topographical effects [2], [3]. For ionic implantation source drain (SD) photolithography step, wafer topography influences resulting in implant pattern variation are various: active silicon areas, Poly patterns, Shallow Trench Isolation (STI) and topographical transitions between these areas. In 28nm bulk SD process step, the large number of wafer stack variations involved in implant pattern modulation implies a complex modeling of optical proximity effects. Furthermore, those topography effects are expected to increase with wafer stack complexity through technology node downscaling evolution. In this context, rigorous simulation can bring significant value for wafer topography modeling evolution in R and D process development environment. Unfortunately, classical rigorous simulation engines are rapidly run time and memory limited with pattern complexity for multiple under layer wafer topography simulation. A presentation of a fast rigorous Maxwell’s equation solving algorithm integrated into a photolithography proximity effects simulation flow is detailed in this paper. Accuracy, run time and memory consumption of this fast rigorous modeling engine is presented through the simulation of wafer topography effects during ionic implantation SD lithography step in 28nm bulk technology. Also, run time and memory consumption comparison is shown between presented fast rigorous modeling and classical rigorous RCWA method through simulation of design of interest. Finally, integration opportunity of such fast rigorous modeling method into OPC flow is discussed in this paper.

Proceedings Article | 6 February 2008 Paper

Paper

Highly dispersive dielectric transmission gratings with 100% diffraction efficiency

Tina Clausnitzer, Thomas Kämpfe, Frank Brückner, Roland Heinze, Ernst-Bernhard Kley, Andreas Tünnermann, Olivier Parriaux, Alexandre Tishchenko

Proceedings Volume 6883, 68830U (2008) https://doi.org/10.1117/12.767783

KEYWORDS: Diffraction gratings, Diffraction, Reflection, Interfaces, Silica, Reflectivity, Dielectrics, Coating, Optical design, Antireflective coatings

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Proceedings Article | 25 April 2006 Paper

Paper

Associating a lossless polarizing function in multilayer laser mirrors by means of a resonant grating

O. Parriaux, A. Tishchenko, F. Pigeon

Proceedings Volume 6187, 61870B (2006) https://doi.org/10.1117/12.668368

KEYWORDS: Polarization, Mirrors, Reflection, Optical filters, Waveguides, Metals, Wave propagation, Refractive index, Diffraction gratings, Dielectric polarization

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Proceedings Article | 25 April 2006 Paper

Paper

Low loss polarizing beam splitter using the long range plasmon mode along a continuous metal film

Y. Jourlin, E. Gamet, S. Tonchev, A. Tishchenko, O. Parriaux, A. Last

Proceedings Volume 6187, 61870H (2006) https://doi.org/10.1117/12.668364

KEYWORDS: Metals, Polarization, Plasmons, Gold, Beam splitters, Thin films, Polymers, Polymer thin films, Reflection, Photoresist materials

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Proceedings Article | 18 April 2006 Paper

Paper

Exact solution to diffraction on a grating with parallelogramic grooves by the true modal method

M. Foresti, A. Tishchenko

Proceedings Volume 6182, 61821G (2006) https://doi.org/10.1117/12.668476

KEYWORDS: Diffraction gratings, Diffraction, Polarization, Radio propagation, Waveguides, Interfaces, Dispersion, Magnetism, Matrices, Modeling

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Proceedings Article | 15 October 2005 Paper

Paper

High-efficiency transmission gratings for unpolarized illumination: an intelligible analysis of the diffraction process

T. Clausnitzer, T. Kämpfe, E.-B. Kley, A. Tuennermann, U. Peschel, A. Tishchenko, O. Parriaux

Proceedings Volume 5962, 596219 (2005) https://doi.org/10.1117/12.625170

KEYWORDS: Diffraction gratings, Diffraction, Wave propagation, Light wave propagation, Polarization, Waveguides, Silica, Dielectrics, Optical design, Geometrical optics

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Proceedings Article | 15 September 2004 Paper

Paper

Scaling rules for the design of a narrow-band grating filter at the focus of a free-space beam

Emmanuel Bonnet, Alain Cachard, Alexandre Tishchenko, Olivier Parriaux

Proceedings Volume 5450, (2004) https://doi.org/10.1117/12.547445

KEYWORDS: Waveguides, Photonic crystals, Silicon, Optical filters, Finite-difference time-domain method, Optical design, Diffraction, Neodymium, Free space, Diffraction gratings

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Proceedings Article | 1 September 2004 Paper

Paper

Resonant grating effects at terahertz frequencies

Emmanuel Bonnet, Alain Cachard, Alexandre Tishchenko, Olivier Parriaux, Frederic Garet, Jean-Louis Coutaz, Georges-Andre Racine

Proceedings Volume 5466, (2004) https://doi.org/10.1117/12.547447

KEYWORDS: Waveguides, Terahertz radiation, Silicon, Diffraction gratings, Signal detection, Semiconducting wafers, Optical filters, Wave propagation, Optics manufacturing, Reflection

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Proceedings Article | 26 February 2004 Paper

Paper

Picometer-resolution assessment of the period constancy in a FBG phase mask

Yves Jourlin, Alexandre Tishchenko, C. Pedri, Andrew Zanzal, James Unruh

Proceedings Volume 5252, (2004) https://doi.org/10.1117/12.513696

KEYWORDS: Sensors, Head, Fiber Bragg gratings, Spatial frequencies, Quartz, Etching, Photomasks, Inverse problems, Electron beams, Standards development

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Proceedings Article | 25 February 2004 Paper

Paper

Optimization of the strength of a graded-index slab waveguide grating

Olivier Montalien, Valerie Brioude, Alexandre Tishchenko, Olivier Parriaux

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.513693

KEYWORDS: Waveguides, Diffraction gratings, Diffraction, Wave propagation, Interfaces, Glasses, Reflection, Ion exchange, Polarization, Waveguide modes

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Proceedings Article | 19 February 2004 Paper

Paper

Monolithic diffractive interference detector on silicon

Yves Jourlin, Stephanie Reynaud, Nathalie Destouches, Alexandre Tishchenko, Sabine Fourment, Philippe Arguel, Francoise Lozes, Gerard Sarrabayrouse, Jerome Valentin

Proceedings Volume 5251, (2004) https://doi.org/10.1117/12.513694

KEYWORDS: Sensors, Diffraction gratings, Silicon, Diffraction, Polarization, Photodetectors, Modeling, Chemical elements, Computer programming, Phase measurement

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Proceedings Article | 18 February 2004 Paper

Paper

Analytical solutions of 2D grating diffraction: GSM versus Rayleigh hypothesis

Alexandre Tishchenko

Proceedings Volume 5249, (2004) https://doi.org/10.1117/12.513688

KEYWORDS: Picosecond phenomena, Diffraction gratings, Diffraction, Global system for mobile communications, Matrices, Free space, Waveguides, Electromagnetism, Radio propagation, Free space optics

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Proceedings Article | 18 February 2004 Paper

Paper

Waveguide grating coupling of 2D focused beam under normal incidence: a phenomenological approach

Alexandre Tishchenko, Olivier Parriaux, Dieter Neuschafer

Proceedings Volume 5249, (2004) https://doi.org/10.1117/12.513685

KEYWORDS: Waveguides, Diffraction, Diffraction gratings, Radio propagation, Wave propagation, Waveguide modes, Light wave propagation, Free space, Planar waveguides, Electromagnetism

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Proceedings Article | 18 February 2004 Paper

Paper

Single order Fabry-Perot polarizing laser mirror

Marwan Ahmed, Alexandre Tishchenko, Florent Pigeon, Olivier Parriaux

Proceedings Volume 5249, (2004) https://doi.org/10.1117/12.513689

KEYWORDS: Mirrors, Electronic filtering, Waveguides, Polarization, Fabry–Perot interferometers, Resonators, Optical filters, Reflection, Reflectivity, Wave propagation

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Proceedings Article | 18 February 2004 Paper

Paper

Modal basis of 2D waveguides by the generalized source method

Alexandre Tishchenko

Proceedings Volume 5249, (2004) https://doi.org/10.1117/12.513687

KEYWORDS: Waveguides, Global system for mobile communications, Wave propagation, Waveguide modes, Free space, Spatial frequencies, Electromagnetism, Cladding, Maxwell's equations, Lead

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Proceedings Article | 3 April 2003 Paper

Paper

Integrated polarizing function for solid state lasers

Marwan Ahmed, Florent Pigeon, Alexandre Tishchenko, Olivier Parriaux, Youcef Ouerdane, Stephanie Reynaud, Jean Pommier, Svetlen Tonchev

Proceedings Volume 4944, (2003) https://doi.org/10.1117/12.472437

KEYWORDS: Polarization, Mirrors, Nd:YAG lasers, Diffraction gratings, Tantalum, Solid state lasers, Multilayers, Reflection, Spectroscopy, Etching

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Proceedings Article | 26 December 2001 Paper

Paper

Diffraction gratings: generating the exact and complete solution of an electromagnetic problem from the approximate solution of another problem

Alexandre Tishchenko, M. Hamdoun

Proceedings Volume 4438, (2001) https://doi.org/10.1117/12.451477

KEYWORDS: Electromagnetism, Diffraction, Global system for mobile communications, Diffraction gratings, Binary data, Modulation, Physics, Free space, Interfaces, Matrices

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SPIE Journal Paper | 1 August 2001

Phase relationships in a two-beam grating recombiner

Y. Jourlin, Olivier Parriaux, Alexandre Tishchenko

OE, Vol. 40, Issue 08, (August 2001) https://doi.org/10.1117/12.10.1117/1.1386375

KEYWORDS: Diffraction gratings, Diffraction, Sensors, Phase shifts, Phase shift keying, Signal detection, Modulation, Polarization, Beam splitters, Optical engineering

Proceedings Article | 10 March 1999 Paper

Paper

High-spatial-frequency grating technology for microsystem applications

Olivier Parriaux, Florent Pigeon, Y. Jourlin, Alain Mure-Ravaud, Alexandre Tishchenko

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341255

KEYWORDS: Diffraction gratings, Sensors, Optics manufacturing, Beam splitters, Waveguides, Microsystems, Spatial frequencies, Laser applications, Manufacturing, Molecules

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Proceedings Article | 18 June 1998 Paper

Paper

High-efficiency dielectric gratings for laser resonators

Alexandre Tishchenko, Ildar Salakhutdinov, Vladimir Sychugov, Olivier Parriaux

Proceedings Volume 3291, (1998) https://doi.org/10.1117/12.310580

KEYWORDS: Diffraction gratings, Metals, Diffraction, Dielectrics, Mirrors, Grazing incidence, Dielectric polarization, Copper, Laser resonators, Thin films

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Proceedings Article | 24 September 1997 Paper

Paper

Unidirectional waveguide grating coupling by means of parallelogrammic grooves

Alexandre Tishchenko, Nikolay Lyndin, S. Loktev, Vladimir Sychugov, Boris Usievich, Olivier Parriaux

Proceedings Volume 3099, (1997) https://doi.org/10.1117/12.281236

KEYWORDS: Waveguides, Etching, Photoresist materials, Metals, Waveguide modes, Ion beams, Aluminum, Diffraction gratings, Glasses, Reflection

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SPIE Journal Paper | 1 November 1996

Optimization and control of grating coupling to or from a silicon-base optical waveguide

Vladimir Sychugov, Alexandre Tishchenko, Boris Usievich, Olivier Parriaux

OE, Vol. 35, Issue 11, (November 1996) https://doi.org/10.1117/12.10.1117/1.601048

KEYWORDS: Waveguides, Silicon, Interfaces, Integrated optics, Sensors, Diffraction gratings, Optical engineering, Semiconductors, Refractive index, Physics

Proceedings Article | 25 August 1994 Paper

Paper

Radiationally coupled corrugated waveguides

Boris Usievich, Vladimir Sychugov, Alexandre Tishchenko

Proceedings Volume 2212, (1994) https://doi.org/10.1117/12.185169

KEYWORDS: Waveguides, Dispersion, Waveguide modes, Wave propagation, Refractive index, Diffraction, Interfaces, Physics, Optoelectronics, Complex systems

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Proceedings Article | 10 December 1993 Paper

Paper

Diffraction gratings in a system of two radiationally coupled waveguides

S. Loktev, V. Maslennikov, Vladimir Sychugov, Alexandre Tishchenko, Boris Usievich

Proceedings Volume 2108, (1993) https://doi.org/10.1117/12.165413

KEYWORDS: Waveguides, Refractive index, Diffraction gratings, Dispersion, Waveguide modes, Thin films, Interfaces, Planar waveguides, Glasses, Physics

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Proceedings Article | 10 December 1993 Paper

Paper

Corrugated waveguide excitation by normal-incidence light beam

Vladimir Sychugov, Alexandre Tishchenko, Olivier Parriaux

Proceedings Volume 2108, (1993) https://doi.org/10.1117/12.165434

KEYWORDS: Waveguides, Waveguide modes, Diffraction, Reflection, Physics, Reflectors, Distributed Bragg reflectors, Destructive interference

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Showing 5 of 28 publications

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