Dr. Andreas Gehner Profile

Dr. Andreas Gehner

Head - Adaptive Optics at Fraunhofer Institut fur Photonische Mikrosysteme

SPIE Involvement:

Author

Publications (16)

Proceedings Article | 5 March 2021 Presentation + Paper

Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators

Christoph Hohle, Sebastian Döring, Martin Friedrichs, Andreas Gehner, Dirk Rudloff, Matthias Schulze, Ronald Stübner, Daniela Trenkler

Proceedings Volume 11697, 116970V (2021) https://doi.org/10.1117/12.2583036

KEYWORDS: Microelectromechanical systems, Spatial light modulators, Semiconducting wafers, Mirrors, Lithography, Wafer-level optics, System on a chip, Surface micromachining, Optical lithography, Microopto electromechanical systems

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Proceedings Article | 28 February 2020 Paper

Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform

A. Gehner, S. Döring, D. Rudloff, D. Kunze, P. Dürr, S. Francés, L. Hänsel, H. Torlee, A. Elgner, M. Eckert, M. Friedrichs, J. Heber, J. Schmidt, W. Pufe, C. Hohle, M. Schulze, M. Wagner

Proceedings Volume 11293, 1129302 (2020) https://doi.org/10.1117/12.2543052

KEYWORDS: Mirrors, Actuators, Micromirrors, Optical lithography, Calibration, Analog electronics, CMOS technology

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SPIE Journal Paper | 1 April 2008

Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors

Jan-Uwe Schmidt, Martin Friedrichs, Andreas Gehner

JM3, Vol. 7, Issue 02, 021012, (April 2008) https://doi.org/10.1117/12.10.1117/1.2945230

KEYWORDS: Actuators, Mirrors, Aluminum, Reflectivity, Micromirrors, CMOS technology, Analog electronics, Deep ultraviolet, Multilayers, Etching

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Proceedings Article | 14 February 2007 Paper

AO SLM demonstration system and test bed

Michael Wildenhain, Jens Knobbe, Andreas Gehner, Michael Wagner, Hubert Lakner

Proceedings Volume 6467, 64670E (2007) https://doi.org/10.1117/12.702338

KEYWORDS: Modulation transfer functions, Adaptive optics, Spatial light modulators, Wavefronts, Mirrors, Microelectromechanical systems, Monochromatic aberrations, Spatial frequencies, Imaging systems, Micromirrors

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Proceedings Article | 9 February 2007 Paper

CMOS integrable micromirrors with highly improved drift-stability

Jan Schmidt, Jens Knobbe, Andreas Gehner, Hubert Lakner

Proceedings Volume 6467, 64670R (2007) https://doi.org/10.1117/12.707630

KEYWORDS: Mirrors, Actuators, Reflectivity, Aluminum, Silicon, Micromirrors, Electrodes, Analog electronics, Microelectromechanical systems, X-rays

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Proceedings Article | 23 January 2006 Paper

Micro-actuator with extended analog deflection at low drive voltage

Peter Dürr, Andreas Gehner, Jan Schmidt, Detlef Kunze, Michael Wagner, Hubert Lakner

Proceedings Volume 6114, 61140I (2006) https://doi.org/10.1117/12.645826

KEYWORDS: Actuators, Electrodes, Mirrors, Capacitors, Analog electronics, Electronics, Finite element methods, Chemical elements, Safety, Electromagnetism

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Proceedings Article | 23 January 2006 Paper

MEMS analog light processing: an enabling technology for adaptive optical phase control

Andreas Gehner, Michael Wildenhain, Hannes Neumann, Jens Knobbe, Ondrej Komenda

Proceedings Volume 6113, 61130K (2006) https://doi.org/10.1117/12.651731

KEYWORDS: Mirrors, Micromirrors, Microelectromechanical systems, Adaptive optics, Spatial light modulators, Analog electronics, Computer programming, Human-machine interfaces, Phase shift keying, Modulation

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SPIE Journal Paper | 1 October 2005

Micro-opto-electro-mechanical systems technology and its impact on photonic applications

Harald Schenk, Alexander Wolter, Ulrike Dauderstädt, Andreas Gehner, Hubert Lakner

JM3, Vol. 4, Issue 04, 041501, (October 2005) https://doi.org/10.1117/12.10.1117/1.2131824

KEYWORDS: Mirrors, Micromirrors, Microopto electromechanical systems, Electrodes, Microelectromechanical systems, Silicon, Semiconducting wafers, Aluminum, Photomicroscopy, Spatial light modulators

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Proceedings Article | 18 August 2005 Paper

MEMS phase former kit for high-resolution wavefront control

Andreas Gehner, Michael Wildenhain, Hannes Neumann, Andreas Elgner, Harald Schenk

Proceedings Volume 5894, 58940H (2005) https://doi.org/10.1117/12.618326

KEYWORDS: Mirrors, Micromirrors, Wavefronts, Microelectromechanical systems, Adaptive optics, Computer programming, Phase shift keying, Control systems, Analog electronics, Human-machine interfaces

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Proceedings Article | 12 October 2004 Paper

Tests on micromirror arrays for adaptive optics

Jan Liesener, Werner Hupfer, Andreas Gehner, Kotska Wallace

Proceedings Volume 5553, (2004) https://doi.org/10.1117/12.558679

KEYWORDS: Wavefronts, Mirrors, Micromirrors, Optical arrays, Adaptive optics, Optical testing, Control systems, Space telescopes, Carbon, Spatial resolution

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Proceedings Article | 24 January 2004 Paper

Photonic microsystems: an enabling technology for light deflection and modulation

Harald Schenk, Alexander Wolter, Ulrike Dauderstadt, Andreas Gehner, Heinrich Grueger, Christian Drabe, Hubert Lakner

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.523948

KEYWORDS: Mirrors, Photonic microstructures, Microsystems, Modulation, Micromirrors, Microelectromechanical systems, Promethium, Metals, Optical filters, Image filtering

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Proceedings Article | 20 January 2003 Paper

Improved vision by eye aberration correction using an active-matrix-addressed micromirror array

Andreas Gehner, Michael Wildenhain, Wolfgang Doleschal, Andreas Elgner, Harald Schenk, Hubert Lakner

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.472902

KEYWORDS: Mirrors, Eye, Micromirrors, Adaptive optics, Wavefronts, Monochromatic aberrations, Analog electronics, Microopto electromechanical systems, Transistors, Capacitors

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Proceedings Article | 2 October 2001 Paper

Active-matrix-addressed micromirror array for wavefront correction in adaptive optics

Andreas Gehner, Wolfgang Doleschal, Andreas Elgner, Reinhard Kauert, Detlef Kunze, Michael Wildenhain

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443095

KEYWORDS: Mirrors, Micromirrors, Analog electronics, Wavefronts, Adaptive optics, Electrodes, Transistors, Optical calibration, Finite element methods, Chemical mechanical planarization

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Proceedings Article | 22 August 2000 Paper

Micromirror arrays for wavefront correction

Andreas Gehner, Michael Wildenhain, Hubert Lakner

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396506

KEYWORDS: Mirrors, Adaptive optics, Analog electronics, Micromirrors, Wavefronts, Electrodes, Phase shifts, Photoresist materials, Electromechanical design, Actuators

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Proceedings Article | 2 September 1999 Paper

Micromirrors for direct writing systems and scanners

Hubert Lakner, Wolfgang Doleschal, Peter Duerr, Andreas Gehner, Harald Schenk, Alexander Wolter, Guenter Zimmer

Proceedings Volume 3878, (1999) https://doi.org/10.1117/12.361264

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Actuators, Silicon, Scanners, Diffraction gratings, Liquids, Diffraction

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Proceedings Article | 26 May 1995 Paper

New system for fast submicron laser direct writing

Heinz Kueck, Michael Bollerott, Wolfgang Doleschal, Andreas Gehner, Wolfram Grundke, Detlef Kunze, Rolf Melcher, Joerg Paufler, Rolf Seltmann, Guenter Zimmer

Proceedings Volume 2440, (1995) https://doi.org/10.1117/12.209280

KEYWORDS: Spatial light modulators, Semiconducting wafers, Excimer lasers, Modulators, Lithography, Wafer-level optics, Electrodes, Mirrors, Optics manufacturing, Optical lithography

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