Dr. Andrei V. Shchegrov Profile

Dr. Andrei V. Shchegrov

Vice President at KLA Corp

SPIE Involvement:

Author

Publications (19)

Proceedings Article | 20 March 2020 Presentation + Paper

On product overlay metrology challenges in advanced nodes

Andrei Shchegrov, Philippe Leray, Yuri Paskover, Liran Yerushalmi, Efi Megged, Yoav Grauer, Roel Gronheid

Proceedings Volume 11325, 113251P (2020) https://doi.org/10.1117/12.2551932

KEYWORDS: Optical parametric oscillators, Metrology, Overlay metrology, Logic, Optical alignment, Semiconducting wafers, 3D metrology, Polarization, Extreme ultraviolet, Etching

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Proceedings Article | 10 April 2013 Paper

Enhancing scatterometry CD signal-to-noise ratio for 1x logic and memory challenges

Derrick Shaughnessy, Shankar Krishnan, Lanhua Wei, Andrei Shchegrov

Proceedings Volume 8681, 86810V (2013) https://doi.org/10.1117/12.2021386

KEYWORDS: Plasma, Lamps, Xenon, Single crystal X-ray diffraction, Light sources, Metrology, Signal to noise ratio, Spectroscopy, Electrodes, Scatterometry

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Proceedings Article | 22 February 2011 Paper

Modulation and efficiency characteristics of miniature microchip green laser sources based on PPMgOLN nonlinear material

John Khaydarov, Stepan Essaian, Andrei Shchegrov, Slav Slavov, Gevorg Gabrielyan, Armen Poghosyan, Suren Soghomonyan

Proceedings Volume 7917, 791705 (2011) https://doi.org/10.1117/12.875772

KEYWORDS: Laser sources, Modulation, Projection systems, Laser development, Semiconductor lasers, RGB color model, Photodiodes, Lithium niobate, Nonlinear crystals, Neodymium lasers

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Proceedings Article | 18 February 2010 Paper

Highly efficient and compact microchip green laser source for mobile projectors

John Khaydarov, Stepan Essaian, Greg Nemet, Andrei Shchegrov, Natalia Simanovskaia, Hakob Danielyan, Gevorg Gabrielyan, Armen Poghosyan, Suren Soghomonyan

Proceedings Volume 7582, 758202 (2010) https://doi.org/10.1117/12.843619

KEYWORDS: Projection systems, Laser sources, Semiconductor lasers, Crystals, Nonlinear crystals, Harmonic generation, Laser crystals, Lithium niobate, Waveguides, Laser development

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Proceedings Article | 23 February 2006 Paper

Visible laser and laser array sources for projection displays

Michael Jansen, Brad Cantos, Glen Carey, Rene Dato, Giorgio Giaretta, Sascha Hallstein, William Hitchens, Dicky Lee, Aram Mooradian, Rashit Nabiev, Greg Niven, Andrei Shchegrov, Arvydas Umbrasas, Jason Watson

Proceedings Volume 6135, 61350T (2006) https://doi.org/10.1117/12.651157

KEYWORDS: Laser applications, Semiconductor lasers, Lamps, RGB color model, Semiconducting wafers, Televisions, Projection systems, Laser video displays, Liquid crystal on silicon, Speckle

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Proceedings Article | 14 March 2005 Paper

Development of compact blue-green lasers for projection display based on Novalux extended-cavity surface-emitting laser technology

Andrei Shchegrov, Jason Watson, Dicky Lee, Arvydas Umbrasas, Sascha Hallstein, Glen Carey, William Hitchens, Ken Scholz, Brad Cantos, Greg Niven, Michael Jansen, Jean-Michel Pelaprat, Aram Mooradian

Proceedings Volume 5737, (2005) https://doi.org/10.1117/12.591288

KEYWORDS: Laser applications, Second-harmonic generation, Nonlinear crystals, Laser development, Laser marking, Light sources, Televisions, Pulsed laser operation, Continuous wave operation

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Proceedings Article | 8 July 2004 Paper

532-nm laser sources based on intracavity frequency doubling of extended-cavity surface-emitting diode lasers

Andrei Shchegrov, Arvydas Umbrasas, Jason Watson, Dicky Lee, Charles Amsden, Wonill Ha, Glen Carey, Vincent Doan, Bryan Moran, Alan Lewis, Aram Mooradian

Proceedings Volume 5332, (2004) https://doi.org/10.1117/12.529449

KEYWORDS: Semiconductor lasers, Second-harmonic generation, Laser stabilization, Diode pumped solid state lasers, Laser development, Crystals, Ferroelectric materials, Laser sources, Transmission electron microscopy, Reliability

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Proceedings Article | 16 June 2004 Paper

Laser sources at 460 nm based on intracavity doubling of extended-cavity surface-emitting lasers

Jason Watson, Andrei Shchegrov, Arvydas Umbrasas, Dicky Lee, Charlie Amsden, Wonill Ha, Glen Carey, Vincent Doan, Alan Lewis, Aram Mooradian

Proceedings Volume 5364, (2004) https://doi.org/10.1117/12.529609

KEYWORDS: Second-harmonic generation, Reliability, Nonlinear optics, Semiconductor lasers, Laser sources, Crystals, Laser crystals, Laser development, Reflectivity, Output couplers

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Proceedings Article | 12 September 2003 Paper

Second harmonic generation at 488 nm by intracavity doubling of extended-cavity surface-emitting lasers

Dicky Lee, Andrei Shchegrov, Eva Strzelecka, Jason Watson, Michael Liebman, Charles Amsden, Arvydas Umbrasas, Bryan Moran, Vincent Doan, John McInerney, Aram Mooradian

Proceedings Volume 4972, (2003) https://doi.org/10.1117/12.478552

KEYWORDS: Semiconductor lasers, Argon ion lasers, Reliability, Nonlinear crystals, Mirrors, Second-harmonic generation, Diodes, Spectrum analysis, Harmonic generation, Laser development

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Proceedings Article | 12 September 2003 Paper

Compact efficient visible lasers based on extended-cavity surface-emitting lasers

Jason Watson, John McInerney, Aram Mooradian, Alan Lewis, Andrei Shchegrov, Eva Strzelecka, Dicky Lee, Arvydas Umbrasas, Glen Carey, Brad Cantos, William Hitchens, Vincent Doan, Charles Amsden, Michael Liebman

Proceedings Volume 4967, (2003) https://doi.org/10.1117/12.478407

KEYWORDS: Nonlinear optics, Mirrors, Reliability, Second-harmonic generation, Harmonic generation, Semiconductor lasers, Laser applications, Optical filters, Photography, Optical testing

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Proceedings Article | 19 June 2003 Paper

High-power high-brightness 980-nm lasers based on the extended cavity surface emitting lasers concept

Eva Strzelecka, John McInerney, Aram Mooradian, Alan Lewis, Andrei Shchegrov, Dicky Lee, Jason Watson, Keith Kennedy, Glen Carey, Hailong Zhou, Wonill Ha, Brad Cantos, William Hitchens, David Heald, Vincent Doan, Kevin Lear

Proceedings Volume 4993, (2003) https://doi.org/10.1117/12.479437

KEYWORDS: Semiconductor lasers, Mirrors, Laser development, High power lasers, Reflectivity, Lithium, Vertical cavity surface emitting lasers, Transmission electron microscopy, Second-harmonic generation

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Proceedings Article | 17 June 2003 Paper

Novel 980-nm and 490-nm light sources using vertical-cavity lasers with extended coupled cavities

John McInerney, Aram Mooradian, Alan Lewis, Andrei Shchegrov, Eva Strzelecka, Dicky Lee, Jason Watson, Michael Liebman, Glen Carey, Arvydas Umbrasas, Charles Amsden, Brad Cantos, William Hitchens, David Heald, Vincent Doan

Proceedings Volume 4994, (2003) https://doi.org/10.1117/12.475742

KEYWORDS: Transmission electron microscopy, Mirrors, Single mode fibers, Laser applications, Reflectivity, Light sources, High power lasers, Second-harmonic generation, Vertical cavity surface emitting lasers

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Proceedings Article | 17 June 2003 Paper

490-nm coherent emission by intracavity frequency doubling of extended cavity surface-emitting diode lasers

Andrei Shchegrov, Dicky Lee, Jason Watson, Arvydas Umbrasas, Eva Strzelecka, Michael Liebman, Charles Amsden, Alan Lewis, Vincent Doan, Bryan Moran, John McInerney, Aram Mooradian

Proceedings Volume 4994, (2003) https://doi.org/10.1117/12.475743

KEYWORDS: Semiconductor lasers, Second-harmonic generation, Laser applications, Reliability, Diode pumped solid state lasers, Semiconductors, Laser stabilization, Polarization, Transmission electron microscopy, Laser development

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Proceedings Article | 15 April 2003 Paper

Novel 980-nm and 490-nm light sources using vertical cavity lasers with extended coupled cavities

Proceedings Volume 4942, (2003) https://doi.org/10.1117/12.510062

KEYWORDS: Mirrors, Single mode fibers, Laser applications, Reflectivity, Light sources, High power lasers, Second-harmonic generation, Nonlinear crystals, Thermal effects

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Proceedings Article | 11 March 2003 Paper

High brightness 980 nm pump lasers ased on the Novalux extended cavity surface-emitting laser (NECSEL) concept

Proceedings Volume 4947, (2003) https://doi.org/10.1117/12.476231

KEYWORDS: Transmission electron microscopy, Mirrors, Single mode fibers, Fiber coupled lasers, Reflectivity, Fiber couplers, Laser applications, Second-harmonic generation, Semiconductor lasers

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Proceedings Article | 19 July 1999 Paper

Partially coherent nondiffracting beams

Andrei Shchegrov

Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.354996

KEYWORDS: Bessel beams, Nondiffracting beams, Superposition, Wave propagation, Coherence imaging, Beam shaping, Optics, Optical engineering, Physics, Astronomy

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Proceedings Article | 30 October 1998 Paper

Spectral changes of light scattered from a random metal suface in the Otto attenuated total reflection configuration

Tamara Leskova, Alexei Maradudin, Andrei Shchegrov, Eugenio Mendez

Proceedings Volume 3426, (1998) https://doi.org/10.1117/12.328450

KEYWORDS: Light scattering, Scattering, Reflection, Dielectrics, Metals, Polaritons, Surface plasmon polaritons, Surface roughness, Interfaces, Backscatter

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Proceedings Article | 26 September 1997 Paper

Enhanced backscattering of light from a randomly rough interface between a dipole-active medium and a dielectric

Tamara Leskova, Alexei Maradudin, Andrei Shchegrov

Proceedings Volume 3141, (1997) https://doi.org/10.1117/12.279236

KEYWORDS: Light scattering, Scattering, Dielectrics, Backscatter, Polaritons, Interfaces, Phonons, Reflection, Electromagnetic radiation, Electromagnetic scattering

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The enhanced backscattering of light from randomly rough metal surfaces, which manifests itself as a well-defined peak in the retroreflection direction in the angular distribution of the intensity of the light scattered incoherently has attracted a great deal of attention recently. The backscattering phenomenon is attributed to the coherent interference of multiply-scattered surface plasmon polaritons excited on a metal surface with their time-reversed partners. The coherent interference of multiply-scattered lateral waves excited in the scattering of light from strongly rough dielectric surfaces is known to lead to an enhanced backscattering peak in the angular distribution of the intensity of s-polarized light scattered from them. In this paper we present an analytical theory of the scattering of light from a one- dimensional randomly rough interface between two media. One of the media is a dipole-active medium that is characterized by a frequency-dependent dielectric function, that is negative in a restricted frequency range, while the other is characterized by a frequency-independent, real, positive dielectric constant. We assume that the interface profile function is a single-valued function of the coordinate in the mean plate of the interface that is normal to its grooves and ridges, and constitutes a zero-mean, stationary, Gaussian random process. We assume that either p- or s-polarized electromagnetic waves are incident on the interface from the medium whose dielectric constant is frequency-independent. We study the angular distribution of the light that has been scattered incoherently as a function of the frequency of the incident light. The evolution of the enhanced backscattering peak in the case of p-polarized incident light as the frequency of the incident light is tuned through the frequencies of the dipole-active excitations in the medium whose dielectric function is frequency-dependent, is studied. Different mechanisms for the formation of the enhanced backscattering peak in different frequency regions are discussed.

Proceedings Article | 26 September 1997 Paper

Scattering of electromagnetic waves from a one-dimensional random metal surface with a localized defect

Andrei Shchegrov, Alexei Maradudin

Proceedings Volume 3141, (1997) https://doi.org/10.1117/12.279243

KEYWORDS: Light scattering, Scattering, Backscatter, Metals, Correlation function, Reflection, Electromagnetic scattering, Laser scattering, Electromagnetic radiation, Physics

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Showing 5 of 19 publications

Conference Committee Involvement (7)

Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XV

15 February 2016 | San Francisco, California, United States

Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XIV

9 February 2015 | San Francisco, California, United States

Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XIII

4 February 2014 | San Francisco, California, United States

Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XII

5 February 2013 | San Francisco, California, United States

Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications XI

24 January 2012 | San Francisco, California, United States

Showing 5 of 7 Conference Committees

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