Dr. Ann Spanos Profile

Dr. Ann Spanos

at MIT Lincoln Lab

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Publications (2)

Proceedings Article | 2 April 2010 Paper

Electron-beam directed materials assembly

Richard Kingsborough, Russell Goodman, David Astolfi, Theodore Fedynyshyn

Proceedings Volume 7637, 76370N (2010) https://doi.org/10.1117/12.846000

KEYWORDS: Electron beam lithography, Nanostructures, Picosecond phenomena, Silicon, Polymers, Scanning electron microscopy, Semiconducting wafers, Lithography, Photomicroscopy, Polymer thin films

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Proceedings Article | 7 March 2008 Paper

High-index immersion lithography: preventing lens photocontamination and identifying optical behavior of LuAG

V. Liberman, M. Rothschild, S. Palmacci, R. Bristol, J. Byers, N. J. Turro, X. Lei, N. O'Connor, P. Zimmerman

Proceedings Volume 6924, 692416 (2008) https://doi.org/10.1117/12.771462

KEYWORDS: Contamination, Absorbance, Hydrogen, Microfluidics, Chemical elements, Laser irradiation, Absorption, Immersion lithography, Oxygen, Refractive index

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