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Dr. Arun Kumar Nallani
Sr. Staff Product Development Engineer
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Publications (4)
Proceedings Article | 15 May 2007 Paper
Ferromagnetic 3D impellor-shaped micro-stirrer bar for micromixing
Proceedings Volume 6589, 65890C (2007) https://doi.org/10.1117/12.722098
KEYWORDS: Microfluidics, Diffusion, Liquids, Magnetism, Interfaces, Glasses, Plasma etching, Plasma systems, Fabrication, Ferromagnetics
Proceedings Article | 1 July 2005 Paper
Wafer level optoelectronic device packaging using MEMS
Arunkumar Nallani, Ting Chen, J.-B. Lee, Donald Hayes, David Wallace
Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608741
KEYWORDS: Vertical cavity surface emitting lasers, Microlens, Micro optics, Microelectromechanical systems, Optical components, Semiconducting wafers, Polymers, Optical alignment, Printing, Inkjet technology
Proceedings Article | 24 April 2003 Paper
Characterization of SU-8 as a resist for electron-beam lithography
Arun Nallani, Sang Won Park, Jeong Bong Lee
Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499112
KEYWORDS: Electron beam lithography, Photoresist materials, Polymethylmethacrylate, Nickel, Lithography, Electroplating, Scanning electron microscopy, Photomicroscopy, Electron beams, Polymers
Proceedings Article | 16 January 2003 Paper
3D self-aligned microassembled electrical interconnects for heterogeneous integration
Trent Huang, Erik Nilsen, Matt Ellis, Kabseog Kim, Ken Tsui, George Skidmore, Chuck Goldsmith, Arunkumar Nallani, Jeong-Bong Lee
Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.476319
KEYWORDS: Microelectromechanical systems, Connectors, Indium, Metals, Resistance, Gold, Directed self assembly, Robotic systems, Etching, Semiconducting wafers
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