The surface of the gold film grating appeared to different degrees of carbon burning phenomenon under high energy laser irradiation, which resulted in the degradation of the grating performance. Thus, in this study, the main components and relative contents of organic contaminants in the wall and air at different positions in the chirped pulse amplification system were detected by gas chromatography and mass spectrometry. The organic molecules were volatilized from potential sources such as components and pump oil or dust produced by stray light irradiation of carbon-based materials. The contaminant C12H38O5Si6 was found at multiple sampling sites, indicating that the hydrocarbon molecules in the contaminant formed a chemical bond with the molecular structure of silicon and oxygen on the surface of the optical component. Compared to physical adsorption, this chemical bond adsorption is stronger and more difficult to remove. The effect of long-term vacuum organic contamination on the diffraction efficiency of the gold grating was not significant enough. On the contrary, organic residual contaminants were formed in the laser-irradiated area of the surface of the gold grating, and the diffraction efficiency was significantly reduced to two-thirds of the undamaged area. Many small organic molecules, particles and water molecules were deposited in the grooves on the surface of the gold grating, and carbonization occurs under the action of ultra-short pulse laser. A stress pit appeared in the center area of laser irradiation, causing damage to the surface of the grating.
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