Mr. Bo Cui Profile

Bo Cui

at National Research Council Canada

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 6 May 2005 Paper

Fabrication of a 3D nano-imprint template with a conformal dry vapor deposited electron beam resist

Jacques Beauvais, Eric Lavallee, Andrew Zanzal, Dominique Drouin, Kien Mun Lau, Teodor Veres, Bo Cui

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599795

KEYWORDS: Etching, Lithography, Photomasks, Electron beam lithography, Electron beams, Photomicroscopy, Reactive ion etching, Silica, Metals, Optical lithography

Read Abstract +

Nano-Imprint lithography has garnered much interest in the microlithography and nano-fabrication communities, and appears on the ITRS as a possible future lithography solution. The promise of this approach includes realization of ultimately finer features than might be possible through optical lithography and simplification of mask pattern complexity through the elimination of optical enhancements such as phase shifting and optical proximity correction. Imprinting approaches have demonstrated that sub-50nm lithography of 2D structures is possible using this approach. A potentially enabling method to enhancing imprint lithography is to add additional structures to a 2D template to form 3D profiles, thereby realizing additional benefits that can be achieved through imprinting 3D structures. In this paper we discuss fabrication of such a template, which has the potential to eliminate masking layers by allowing for two or more layers to be imprinted with a single template. A 2D template is formed on a fused silica substrate using Quantiscript's QSR-5 sterol-based vapor deposited electron beam resist, low energy e-beam lithography and reactive ion etching of the underlying substrate. Vapor deposition is especially conducive for patterning ultra thin (<50nm) layers of resist on imprint templates where high resolution structures on the order of 50-100nm are desired. After complete fabrication of the 2D template, a second resist vapor deposition, lithography and etch sequence is performed to add the 3D structures. Since the QSR-5 vapor deposited resist exhibits substrate conformal properties, uniformly thin coatings can be achieved on both 2D surfaces, allowing for high resolution trench-bottom or ridge/mesa-top lithography and processing while simultaneous protection of the initial 2D structures is realized.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years