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Dr. Boris Yokhin
at Jordan Valley Semiconductors Ltd
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Publications (1)
Proceedings Article | 27 August 1998 Paper
In-line x-ray fluorescence metrology of metals and ultrathin barrier layers for ULSI applications
Yosi Shacham-Diam, Boris Yokhin, Itzhak Mazor, Avishai Kepten, Roey Shaviv, Ayelet Gabai
Proceedings Volume 3509, (1998) https://doi.org/10.1117/12.324424
KEYWORDS: Metrology, X-ray fluorescence spectroscopy, Metals, X-rays, Measurement devices, Inspection, Thin films, Crystals, Surface roughness, Image resolution
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