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Prof. Brendan J. Griffin
at Univ of Western Australia
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 15 April 2010 Paper
Evaluating SEM performance from the contrast transfer function
David Joy, Joseph Michael, Brendan Griffin
Proceedings Volume 7638, 76383J (2010) https://doi.org/10.1117/12.846455
KEYWORDS: Contrast transfer function, Scanning electron microscopy, Spatial frequencies, Image resolution, Signal processing, Microscopes, Ions, Electron microscopes, Metrology, Spatial resolution
Proceedings Article | 24 March 2008 Paper
Modeling for metrology with a helium beam
Proceedings Volume 6922, 69221W (2008) https://doi.org/10.1117/12.772300
KEYWORDS: Ions, Metrology, Helium, Monte Carlo methods, Gold, Solids, Ion beams, Copper, Aluminum, Silver
Proceedings Article | 5 April 2007 Paper
Device metrology with high-performance scanning ion beams
David Joy, Brendan Griffin, John Notte, Lewis Stern, Shawn McVey, Bill Ward, Clarke Fenner
Proceedings Volume 6518, 65181I (2007) https://doi.org/10.1117/12.710926
KEYWORDS: Ions, Ion beams, Metrology, Electron beams, Scanning electron microscopy, Helium, Image enhancement, Microscopes, Image resolution, Signal generators
Conference Committee Involvement (3)
Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
24 April 2012 | Baltimore, Maryland, United States
Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
26 April 2011 | Orlando, Florida, United States
Scanning Microscopy 2010
17 May 2010 | Monterey, California, United States
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