Dr. Byongseog Lee
at SK Hynix Inc
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 18 March 2016 Paper
Sarohan Park, ByoungHoon Lee, Byong-Seog Lee, Inwhan Lee, Chang-Moon Lim
Proceedings Volume 9776, 97760E (2016) https://doi.org/10.1117/12.2219169
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Optical lithography, Error analysis, Double patterning technology, EUV optics, Overlay metrology, Scanners, Particles, Optical parametric oscillators, Lithography

Proceedings Article | 19 March 2015 Paper
Honggoo Lee, Byongseog Lee, Sangjun Han, Myoungsoo Kim, Wontaik Kwon, Sungki Park, DongSub Choi, Dohwa Lee, Sanghuck Jeon, Kangsan Lee, Tal Itzkovich, Nuriel Amir, Roie Volkovich, Eitan Herzel, Mark Wagner, Mohamed El Kodadi
Proceedings Volume 9424, 94242B (2015) https://doi.org/10.1117/12.2085272
KEYWORDS: Overlay metrology, Metrology, Scatterometry, Signal processing, Process control, Quality measurement, Lithography, Double patterning technology, Photomasks, Uncertainty analysis

Proceedings Article | 19 March 2015 Paper
Honggoo Lee, Byongseog Lee, Sangjun Han, Myoungsoo Kim, Wontaik Kwon, Sungki Park, DongSub Choi, Dohwa Lee, Sanghuck Jeon, Kangsan Lee, Roie Volkovich, Tal Itzkovich, Eitan Herzel, Mark Wagner, Mohamed Elkodadi
Proceedings Volume 9424, 94240C (2015) https://doi.org/10.1117/12.2085270
KEYWORDS: Overlay metrology, Metrology, Quality measurement, Signal processing, Image quality, Lithography, Target detection, Semiconducting wafers, Sensors, Etching

Proceedings Article | 17 March 2015 Paper
Yongjin Kim, Sangdo Lee, Taewoo Jung, Byoungseok Lee, Nohjung Kwak, Sungki Park
Proceedings Volume 9428, 942806 (2015) https://doi.org/10.1117/12.2087765
KEYWORDS: Etching, Dielectrics, Capacitors, Capacitance, Polymers, Ions, Scanning electron microscopy, Wet etching, Molecules, Yield improvement

Proceedings Article | 16 April 2011 Paper
Yong-Hyun Lim, Jae-Doo Eom, Woo-Yung Jung, Min-Sik Jang, Byung-Seok Lee, Jin-Woong Kim
Proceedings Volume 7972, 79722W (2011) https://doi.org/10.1117/12.869936
KEYWORDS: Photoresist materials, Oxides, Silicon, Silicon films, Semiconducting wafers, Photoresist developing, Diffusion, Ions, Gases, Chemical reactions

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top