Dr. Byoungyoul Park
at National Research Council Canada
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 9 April 2024 Poster + Paper
Proceedings Volume 12956, 129560M (2024) https://doi.org/10.1117/12.3010179
KEYWORDS: Etching, Silicon, Semiconducting wafers, Actuators, Wet etching, Lithography, Fabrication, Adaptive optics, Photoresist materials, Potassium

Proceedings Article | 2 March 2022 Poster + Paper
Proceedings Volume 12013, 120130G (2022) https://doi.org/10.1117/12.2607847
KEYWORDS: Electrodes, Actuators, Microelectromechanical systems, Solids, Finite element methods, Nanotechnology, Microopto electromechanical systems, Free space, Electromagnetism, Computer engineering

SPIE Journal Paper | 14 January 2019
Elnaz Afsharipour, Ramin Soltanzadeh, Byoungyoul Park, Dwayne Chrusch, Cyrus Shafai
JM3, Vol. 18, Issue 01, 015001, (January 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.1.015001
KEYWORDS: Mirrors, Micromirrors, Microelectromechanical systems, Magnetism, Actuators, Silicon, Semiconducting wafers, Finite element methods, Motion measurement, Electromagnetism

Proceedings Article | 11 July 2018 Paper
Colin Ross, Scott Chapman, Kamal El-Sankary, Cyrus Shafai, Greg Burley, Yu Zhou, Byoungyoul Park
Proceedings Volume 10703, 107034G (2018) https://doi.org/10.1117/12.2314256
KEYWORDS: Microelectromechanical systems, Actuators, Digital signal processing, Deformable mirrors, Transistors, Packaging, Adaptive optics, Electronics, Prototyping, Analog electronics

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