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Changjie Sun
at Shanghai Huali Integrated Circuit Corp.
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Publications (1)
Proceedings Article | 26 May 2022 Presentation + Paper
A machine learning-based solution for modulated image analysis in lithography process stability diagnosis
Peng Wu, Qi Zhu, Jihong Yang, Changjie Sun, Yiming Zhu, Abhishek Vikram, Ye Chen, Guojie Cheng, Hui Wang, Qing Zhang, Wenkui Liao
Proceedings Volume 12052, 1205213 (2022) https://doi.org/10.1117/12.2613403
KEYWORDS: Image processing, Scanning electron microscopy, Semiconducting wafers, Image analysis, Image classification, Machine learning, Image enhancement, Optical lithography
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