Three-dimensional optical Yagi-Uda nanoantenna array are fabricated using Nanospherical-Lens Lithography (NLL). The fabrication method can produce nanoantenna array that covers large area and with high throughput. The individual Yagi-Uda nanoantenna is consisted with 3 Au nanodisks separated by a thin layer of SiO2 obtained through sequential evaporation using NLL. The operation wavelength of the nanoantenna is designed is in the near infrared, which can be easily controlled by varying the structural parameters during NLL. We believe the results shown in this study can be applied to obtain directional antenna of nano-emitters and receivers in the near future.
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