Dr. Chih-Wei Lai
Adjunct Professor at Michigan State Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 25 September 2007 Paper
Ya-Ping Hsieh, Ji-Wei Chen, Chi-Te Liang, Yang-Fang Chen, Chih-Wei Lai, Pi-Tai Chou
Proceedings Volume 6641, 66411C (2007) https://doi.org/10.1117/12.729228
KEYWORDS: Gold, Surface plasmons, Electrons, Quenching (fluorescence), Nanocomposites, Semiconductors, Metals, Luminescence, Nanoparticles, Nanocrystals

Proceedings Article | 21 July 2000 Paper
Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390080
KEYWORDS: Inspection, Extreme ultraviolet, Photons, Photomasks, Extreme ultraviolet lithography, Interference (communication), Mirrors, Defect inspection, Scattering, Particles

Proceedings Article | 21 July 2000 Paper
Pei-yang Yan, Chih-wei Lai, Gregory Cardinale
Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390039
KEYWORDS: Photomasks, Opacity, Critical dimension metrology, Extreme ultraviolet, Semiconducting wafers, Process control, Extreme ultraviolet lithography, Printing, Metals, Error analysis

Proceedings Article | 30 December 1999 Paper
Proceedings Volume 3873, (1999) https://doi.org/10.1117/12.373375
KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Inspection, Scattering, Photomasks, Sensors, Scanners, Signal detection, Defect inspection, Multilayers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top