Dr. Chinlee Wang Profile

Dr. Chinlee Wang

President at X-Scan Imaging Corp

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Publications (1)

Proceedings Article | 4 September 1998 Paper

Sub-50-nm PtSi Schottky source/drain MOSFETs

Chinlee Wang, John Snyder, John Tucker

Proceedings Volume 3506, (1998) https://doi.org/10.1117/12.323975

KEYWORDS: Oxides, Field effect transistors, Platinum, Silicon, Semiconductors, Metals, Time metrology, Picosecond phenomena, Temperature metrology, Transmission electron microscopy

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