Directed self-assembly (DSA) of block copolymers (BCPs) is one of the most promising techniques to tackle the ever-increasing demand for sublithographic features in semiconductor industries. BCPs with high Flory–Huggins parameter (χ) are of particular interest due to their ability to self-assemble at the length scale of sub-10 nm. However, such high-χ BCPs typically have imbalanced surface energies between respective blocks, making it a challenge to achieve desired perpendicular orientation. To address this challenge, we mixed a fluorine-containing polymeric additive with poly(2-vinylpyridine)-block-polystyrene-block-poly(2-vinylpyridine) (P2VP-b-PS-b-P2VP) and successfully controlled the orientation of the high-χ triblock copolymer. The additive selectively mixes with P2VP block through hydrogen bonding and can reduce the dissimilarity of surface energies between PS and P2VP blocks. After optimizing additive dose and annealing conditions, desired perpendicular orientation formed upon simple thermal annealing. We further demonstrated DSA of this material system with five times density multiplication and a half-pitch as small as 8.5 nm. This material system is also amenable to sequential infiltration synthesis treatment to selectively grow metal oxide in P2VP domains, which can facilitate the subsequent pattern transfer. We believe that this integration-friendly DSA platform using simple thermal annealing holds the great potential for sub-10 nm nanopatterning applications.
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Picosecond phenomena, Tomography, System on a chip, Chemistry, Scanning transmission electron microscopy, Transmission electron microscopy, Semiconducting wafers, 3D image processing
Acquiring three-dimensional (3-D) information becomes increasingly important for the development of block copolymer (BCP) directed self-assembly (DSA) lithography, as two-dimensional imaging is no longer sufficient to describe the 3-D nature of DSA morphology and probe hidden structures under the surface. Using the post-DSA membrane fabrication technique and scanning transmission electron microscopy tomography, we were able to characterize the 3-D structures of BCP in graphoepitaxial DSA hole shrink process. Different DSA structures of singlets formed in templated holes with different surface chemistry and geometry were successfully captured and their 3-D shapes were reconstructed from tomography data. The results reveal that strong polystyrene-preferential sidewalls are necessary to create vertical DSA cylinders and that template size outside of process window could result in defective DSA results in 3-D. Our study as well as the established 3-D metrology would greatly help to develop a fundamental understanding of the key DSA factors for optimizing the graphoepitaxial hole shrink process.
Directed self-assembly (DSA) of block copolymers (BCPs) is one of the most promising techniques to tackle the everincreasing demand for sub-lithographic features in semiconductor industries. BCPs with high Flory Huggins parameter (χ) are of particular interest due to their ability to self-assemble at the length scale in sub-10 nm regime. However, such high-χ BCPs typically have imbalanced surface energies between respective blocks, making it a challenge to achieve desired perpendicular orientation. To address this challenge, we mixed a polymeric additive with poly(2-vinylpyridine)- block-polystyrene-block-poly(2-vinylpyridine) (P2VP-b-PS-b-P2VP) and successfully achieved perpendicular orientation control of the triblock copolymer. The polymeric additive has lower surface energy than both PS and P2VP blocks, and it selectively interacts with high surface energy P2VP blocks via hydrogen bonding. As a result, the surface energies of PS and P2VP blocks are balanced and perpendicular orientation forms upon thermal annealing. Using this approach, we demonstrate 5X density multiplication DSA with a half pitch of 8.5 nm via chemo-epitaxy. This material system is also amenable to sequential infiltration synthesis (SIS) without the need to remove the additive, revealing its pattern transfer potential. We believe that this integration-friendly DSA approach using simple thermal annealing holds the promise of bringing high-χ BCPs to advanced nanopatterning applications.
KEYWORDS: Polymethylmethacrylate, Picosecond phenomena, Directed self assembly, Tomography, Transmission electron microscopy, System on a chip, Chemistry, Semiconducting wafers, 3D metrology, Scanning transmission electron microscopy
Acquiring three-dimensional information becomes increasingly important for the development of block copolymer (BCP) directed self-assembly (DSA) lithography, as 2D imaging is no longer sufficient to describe the 3D nature of DSA morphology and probe hidden structures under the surface. In this study, using post-DSA membrane fabrication technique and STEM (scanning transmission electron microscopy) tomography we were able to characterize the 3D structures of BCP in graphoepitaxial DSA hole shrink process. Different DSA structures of singlets formed in templated holes with different surface chemistry and geometry were successfully captured and their 3D shapes were reconstructed from tomography data. The results reveal that strong PS-preferential sidewalls are necessary to create vertical DSA cylinders and that template size outside of process window could result in defective DSA results in three dimensions. Our study as well as the established 3D metrology would greatly help to develop a fundamental understanding of the key DSA factors for optimization of the graphoepitaxial hole shrink process.
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