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Colin Wadsworth
at Univ of Minnesota Twin Cities
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Publications (1)
Proceedings Article | 27 April 2023 Poster + Presentation + Paper
Characteristic Mueller matrix responses and correlation analysis for vertical GAA nanowire structure manufacturing using RCWA simulated spectra
Colin Wadsworth, Ezra Pasikatan, Nicholas Keller, Andrew Antonelli, Alain Diebold
Proceedings Volume 12496, 1249619 (2023) https://doi.org/10.1117/12.2657690
KEYWORDS: Nanowires, Amorphous silicon, Silicon, Mueller matrices, Silica, Gallium arsenide, Etching, Transistors, Critical dimension metrology, Matrices
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