Dr. Dong Won Chung Profile

Dr. Dong Won Chung

at Rohm and Haas Electronic Materials Korea Ltd

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Author

Publications (2)

Proceedings Article | 1 April 2009 Paper

Advanced immersion contact hole patterning for sub 40nm memory applications: a fundamental resist study

Yun-Kyeong Jang, Jin-Young Yoon, Shi-Yong Lee, Kwang-Sub Yoon, Seok-Hwan Oh, Seong-Woon Choi, Woo-Sung Han, Seokho Kang, Thomas Penniman, Duk-Soo Kim, Dong Won Chung, Sung-Seo Cho, Cheng Bai Xu, George Barclay

Proceedings Volume 7273, 727339 (2009) https://doi.org/10.1117/12.814483

KEYWORDS: Diffusion, Polymers, Electroluminescence, Optical lithography, Photoresist materials, Lithography, Electronics, Image compression, Temperature metrology, Resolution enhancement technologies

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Proceedings Article | 29 March 2006 Paper

Evaluating resist degradation during reactive ion oxide etching using 193 nm model resist formulations

M. May, B. Mortini, C. Sourd, D. Perret, D. Chung, G. Barclay, C. Brochon, G. Hadziioannou

Proceedings Volume 6153, 61530P (2006) https://doi.org/10.1117/12.656397

KEYWORDS: Etching, Polymers, Oxides, Reactive ion etching, FT-IR spectroscopy, Plasma etching, Ions, Resistance, Chemical analysis, Plasma

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