In recent years, lossy mode resonance (LMR) biosensors have proven to be promising devices for the analysis of biological entities. In this work, for the first time, the possibility of observing the LMR effect in photonic integrated sensor based on SU-8 waveguides for biosensing applications is presented. SU-8 is a polymer that is ideally suited for optical waveguide applications due to its very high optical transparency, chemical stability and simple fabrication process. The LMR effect is achieved by using ZnO and TiOx claddings over the waveguides. The influence of different cladding thicknesses and materials on the LMR effect is demonstrated. Different design waveguides are tested. Potential future applications and development steps of integrated LMR sensor will be discussed.
In this work we present reactive sputtered SiOxNy films with a variable refractive index as a convienent solution for contrast improvement of liquid crystal diffuser multi stacks in near-to-eye AR/VR displays. The focus concerns minimization of light reflections between internal structures, in particular ITO, by optimizing internal layers through tailored properties of thin film coatings, as well as subsequent laser patterning of thin film stack. Inorganic thin films have been deposited on glass by physical vapor deposition. Corresponding refractive index, thickness, uniformity and dielectric characteristics and other electro-optical properties have been measured and their impact on the resulting optical performance of the final integrated element stack has been compared against counterparts utilizing traditional polyimide and SiOx films.
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