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Elis Newham
at Univ. of Bristol
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Author
Publications (1)
Proceedings Article | 20 March 2020 Paper
The application of a Rapid Probe Microscope (RPM) for investigating 1D and 2D structures from EUV lithography
Andrew D. Humphris, Alain Moussa, Mircea Dusa, Anne-Laure Charley, Elis Newham, Jenny Goulden, Lei Feng, Christopher Bevis
Proceedings Volume 11325, 113251M (2020) https://doi.org/10.1117/12.2552054
KEYWORDS: 3D image processing, Extreme ultraviolet lithography, Microscopes, 3D metrology, Extreme ultraviolet, Data analysis, Metrology, Statistical analysis, Finite element methods, Microscopy
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