Statistically based Laser Damage Testing (LDT) was performed on clean, polished silicon wafers before and
after First Contact Polymer was applied and removed. Polymer removal results in surfaces that are nearly
atomically clean as evidenced by XPS data and may be a starting basis for developing an LDT based surface
cleanliness test. A LabView controlled nanosecond YAG based LDT system with motion control stages
was built and used to demonstrate significant difference in surface laser damage threshold following cleaning
of already "clean" surfaces. These initial results represent the beginning of a systematic study on a variety of
surfaces to include glass, silicon, germanium, coatings and nonlinear optical crystals as well as diffraction
gratings. Recent independent testing lab results demonstrate YAG laser damage thresholds after polymer removal,
indistinguishable from that of new high power laser optics, on coated BK7 of 15J/cm2 at 20ns and
20Hz. Our initial data indicate a significant increase, as much as 10% in LDT post cleaning.
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