Prof. Erwin Peiner Profile

Prof. Erwin Peiner

at Technische Univ Braunschweig

SPIE Involvement:

Editor | Author

Publications (22)

Proceedings Article | 13 June 2017 Presentation + Paper

Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever

Jiushuai Xu, Maik Bertke, Xiaojing Li, Alaaeldin Gad, Hao Zhou, Hutomo Suryo Wasisto, Erwin Peiner

Proceedings Volume 10246, 102460C (2017) https://doi.org/10.1117/12.2264897

KEYWORDS: Nanorods, Crystals, Actuators, Lithium, Zinc, Scanning electron microscopy, Zinc oxide, Humidity, Sensors, Silicon, Microelectromechanical systems, Biological and chemical sensing, Biomedical optics, Fabrication, Bulk micromachining

Read Abstract +

Proceedings Article | 2 June 2017 Paper

Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection

Maik Bertke, Gerry Hamdana, Wenze Wu, Hutomo Suryo Wasisto, Erwin Peiner

Proceedings Volume 10246, 102460K (2017) https://doi.org/10.1117/12.2266084

KEYWORDS: Wheatstone bridges, Resonators, Device simulation, Nanoparticles, Actuators, Silicon, Sensors, Phase measurement, Signal processing, Design for manufacturability, Manufacturing, Micromachining

Read Abstract +

Proceedings Article | 30 May 2017 Paper

Large-area fabrication of silicon nanostructures by templated nanoparticle arrays

Gerry Hamdana, Maik Bertke, Tobias Südkamp, Hartmut Bracht, Hutomo Suryo Wasisto, Erwin Peiner

Proceedings Volume 10248, 1024808 (2017) https://doi.org/10.1117/12.2264995

KEYWORDS: Nanoparticles, Plasma, Nanolithography, Silicon, Nanostructures, Nanofabrication, Particles, Cryogenics, Dry etching, Etching, Photomasks, Nanowires, Lithography, Surface properties, Modulation

Read Abstract +

SPIE Journal Paper | 27 May 2016 Open Access

Double-meander spring silicon piezoresistive sensors as microforce calibration standards

Gerry Hamdana, Hutomo Suryo Wasisto, Lutz Doering , Chunlei Yan, Lei Zhou, Uwe Brand, Erwin Peiner

OE, Vol. 55, Issue 09, 091409, (May 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.9.091409

KEYWORDS: Sensors, Silicon, Calibration, Sensor calibration, Piezoresistive sensors, Finite element methods, Etching, 3D modeling, Resistors, Optical engineering

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 21 May 2015 Paper

Smart sensors and calibration standards for high precision metrology

Uwe Brand, Sai Gao, Lutz Doering, Zhi Li, Min Xu, Sebastian Buetefisch, Erwin Peiner, Joachim Fruehauf, Karla Hiller

Proceedings Volume 9517, 95170V (2015) https://doi.org/10.1117/12.2179455

KEYWORDS: Silicon, Standards development, Calibration, Microelectromechanical systems, Sensors, Microtechnology, Metrology, Atomic force microscopy, Sensor calibration, Bridges

Read Abstract +

Proceedings Article | 21 May 2015 Paper

Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

Hutomo Suryo Wasisto, Wenze Wu, Erik Uhde, Andreas Waag, Erwin Peiner

Proceedings Volume 9517, 95170B (2015) https://doi.org/10.1117/12.2180151

KEYWORDS: Sensors, Resonators, Nanoparticles, Silicon, Finite element methods, Carbon, Neptunium, Resistors, Head, Wheatstone bridges

Read Abstract +

Proceedings Article | 21 May 2015 Paper

Development of silicon microforce sensors integrated with double meander springs for standard hardness test instruments

Hutomo Suryo Wasisto, Lutz Doering, Alwin Daus, Uwe Brand, Thomas Frank, Erwin Peiner

Proceedings Volume 9517, 95171X (2015) https://doi.org/10.1117/12.2180117

KEYWORDS: Sensors, Silicon, Wheatstone bridges, Deep reactive ion etching, Etching, Standards development, Active sensors, Photoresist materials, Oxides, Semiconducting wafers

Read Abstract +

Proceedings Article | 21 May 2015 Paper

Fabrication of wear-resistant silicon microprobe tips for high-speed surface roughness scanning devices

Hutomo Suryo Wasisto, Feng Yu, Lutz Doering, Stefan Völlmeke, Uwe Brand, Andrey Bakin, Andreas Waag, Erwin Peiner

Proceedings Volume 9517, 951723 (2015) https://doi.org/10.1117/12.2179866

KEYWORDS: Silicon, Sensors, Atomic layer deposition, Etching, Cryogenics, Dry etching, Plasma, Surface roughness, Aluminum, Wet etching

Read Abstract +

Proceedings Article | 17 May 2013 Paper

Simulation and characterization of silicon nanopillar-based nanoparticle sensors

Hutomo Suryo Wasisto, Stephan Merzsch , Kai Huang , Andrej Stranz , Andreas Waag , Erwin Peiner

Proceedings Volume 8763, 876321 (2013) https://doi.org/10.1117/12.2016970

KEYWORDS: Sensors, Silicon, Finite element methods, Nanoparticles, Resonators, 3D modeling, Neptunium, Scanning electron microscopy, Etching, Titanium dioxide

Read Abstract +

Proceedings Article | 17 May 2013 Paper

Fabrication of vertical nanowire resonators for aerosol exposure assessment

Stephan Merzsch , Hutomo Suryo Wasisto, Andrej Stranz , Peter Hinze , Thomas Weimann , Erwin Peiner , Andreas Waag

Proceedings Volume 8763, 87630V (2013) https://doi.org/10.1117/12.2016932

KEYWORDS: Etching, Silicon, Nanolithography, Deep reactive ion etching, Aerosols, Resonators, Cryogenics, Scanning electron microscopy, Sensors, Nanowires

Read Abstract +

Proceedings Article | 17 May 2013 Paper

MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing

Hutomo Suryo Wasisto, Stephan Merzsch , Andreas Waag , Erwin Peiner

Proceedings Volume 8763, 87632L (2013) https://doi.org/10.1117/12.2016938

KEYWORDS: Sensors, Silicon, Etching, Particles, Resistors, Semiconducting wafers, Diffusion, Oxygen, Wheatstone bridges, Cryogenics

Read Abstract +

Proceedings Article | 17 May 2013 Paper

A closed-loop system for frequency tracking of piezoresistive cantilever sensors

Hutomo Suryo Wasisto, Qing Zhang , Stephan Merzsch , Andreas Waag , Erwin Peiner

Proceedings Volume 8763, 876337 (2013) https://doi.org/10.1117/12.2017009

KEYWORDS: Sensors, Silicon, Resonators, Amplifiers, Wheatstone bridges, Linear filtering, Nanoparticles, Signal detection, Oscillators, Electronic filtering

Read Abstract +

SPIE Journal Paper | 7 May 2012

Packaging of MEMS and MOEMS for harsh environments

Julian Kähler, Andrej Stranz, Andreas Waag, Erwin Peiner

JM3, Vol. 11, Issue 02, 021202, (May 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.021202

KEYWORDS: Silver, Sensors, Microelectromechanical systems, Microopto electromechanical systems, Packaging, Wheatstone bridges, Light emitting diodes, Optoelectronic devices, Silicon, Indium gallium nitride

Read Abstract +

Proceedings Article | 5 May 2011 Paper

Nanostructured silicon for thermoelectric

A. Stranz, J. Kähler, A. Waag, E. Peiner

Proceedings Volume 8066, 80662I (2011) https://doi.org/10.1117/12.886841

KEYWORDS: Silicon, Thermoelectric materials, Resistance, Bismuth, Scanning electron microscopy, Dry etching, Etching, Nanostructuring, Electron microscopes, Nanowires

Read Abstract +

Proceedings Article | 5 May 2011 Paper

Design and fabrication of piezoresistive p-SOI Wheatstone bridges for high-temperature applications

Julian Kähler, Lutz Döring, Stephan Merzsch, Andrej Stranz, Andreas Waag, Erwin Peiner

Proceedings Volume 8066, 806603 (2011) https://doi.org/10.1117/12.886855

KEYWORDS: Wheatstone bridges, Silicon, Resistors, Bridges, Temperature metrology, Sensors, Semiconducting wafers, Oxides, Computer aided design, Resistance

Read Abstract +

Proceedings Article | 5 May 2011 Paper

Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass

H. S. Wasisto, S. Merzsch, A. Stranz, A. Waag, E. Uhde, I. Kirsch, T. Salthammer, E. Peiner

Proceedings Volume 8066, 806623 (2011) https://doi.org/10.1117/12.886622

KEYWORDS: Sensors, Nanoparticles, Carbon, Silicon, Wheatstone bridges, Aerosols, Atmospheric particles, Silicon carbide, Microelectromechanical systems, Air contamination

Read Abstract +

Proceedings Article | 3 May 2011 Paper

Cleaning of nanopillar templates for nanoparticle collection using PDMS

S. Merzsch, H. S. Wasisto, A. Waag, I. Kirsch, E. Uhde, T. Salthammer, E. Peiner

Proceedings Volume 8068, 806819 (2011) https://doi.org/10.1117/12.886352

KEYWORDS: Particles, Silicon, Carbon, Atmospheric particles, Silicon carbide, Nanoparticles, Scanning electron microscopy, Aerosols, Picosecond phenomena, Lithography

Read Abstract +

Proceedings Article | 19 May 2009 Paper

Comparison between AlN thin films with different crystal orientations for MEMS applications

A. Ababneh, G. Marchand, H. Seidel, J. Hernando, J. Sánchez-Rojas, Ü. Sökmen, E. Peiner, U. Schmid

Proceedings Volume 7362, 73621N (2009) https://doi.org/10.1117/12.821858

KEYWORDS: Aluminum nitride, Thin films, Silicon, Aluminum, Electrodes, Sputter deposition, Etching, Microelectromechanical systems, Crystals, Piezoelectric effects

Read Abstract +

Proceedings Article | 19 May 2009 Paper

Characterization and simulation of high-quality AlN-actuated resonant suspended beams

J. Hernando, J. Sánchez-Rojas, A. Ababneh, H. Seidel, Ü. Sökmen, E. Peiner, U. Schmid

Proceedings Volume 7362, 73620K (2009) https://doi.org/10.1117/12.821636

KEYWORDS: Electrodes, Aluminum nitride, Finite element methods, Bridges, Silicon, Etching, Resonators, Aluminum, Thin films, Doppler effect

Read Abstract +

Proceedings Article | 19 May 2009 Paper

ICP cryogenic dry etching for shallow and deep etching in silicon

Ü. Sökmen, M. Balke, A. Stranz, S. Fündling, E. Peiner, H.-H. Wehmann, A. Waag

Proceedings Volume 7362, 736213 (2009) https://doi.org/10.1117/12.820917

KEYWORDS: Silicon, Etching, Dry etching, Plasma, Thermoelectric materials, Silicon films, Photoresist materials, Cryogenics, Thin films, Oxides

Read Abstract +

Proceedings Article | 15 May 2007 Paper

A new micromachined sensor system for tactile measurements of high-aspect ratio microstructures

M. Balke, E. Peiner, L. Doering

Proceedings Volume 6589, 65890J (2007) https://doi.org/10.1117/12.724163

KEYWORDS: Sensors, Etching, Calibration, Silicon, Wheatstone bridges, Device simulation, Semiconducting wafers, Resistors, Wet etching, Potassium

Read Abstract +

Proceedings Article | 15 May 2007 Paper

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

Erwin Peiner, Lutz Doering, Michael Balke, Andreas Christ

Proceedings Volume 6589, 65890M (2007) https://doi.org/10.1117/12.721951

KEYWORDS: Calibration, Sensors, Silicon, Metrology, Glasses, Dimensional metrology, Etching, Atomic force microscopy, Standards development, Wheatstone bridges

Read Abstract +