Mr. Fantao Bu Profile

Fantao Bu

at Shanghai Institute of Optics and Fine Mechanics

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Author

Publications (3)

Proceedings Article | 8 November 2018 Paper

The fabrication and measurement of gold reflective grating

Fantao Bu, Yunkai Lu, Changhe Zhou, Minkang Li, Yingjie Yu

Proceedings Volume 10818, 1081810 (2018) https://doi.org/10.1117/12.2500811

KEYWORDS: Diffraction gratings, Diffraction, Laser applications, Polarization, Gold, Reflectivity, Lithography, Power meters, Laser development, Photomasks

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Proceedings Article | 8 November 2018 Paper

Orthogonal crossed gratings fabricated by scanning Dammann lithography

Minkang Li, Changhe Zhou, Chunlong Wei, Wei Jia, Xiansong Xiang, Shiyao Zhu, Fantao Bu, Yunkai Lu

Proceedings Volume 10818, 108180V (2018) https://doi.org/10.1117/12.2500281

KEYWORDS: Lithography, Interferometers, Photoresist materials, Optical encoders, Diffraction gratings, Mirrors, Atomic force microscopy, Laser applications, Photomasks, Lutetium

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Proceedings Article | 6 November 2018 Paper

High-precision 3D measurement of large-sized rough glass using phase-shifting and phase-height mapping

Chao Li, Changhe Zhou, Yu Yan, Fantao Bu

Proceedings Volume 10818, 108180O (2018) https://doi.org/10.1117/12.2500943

KEYWORDS: Glasses, Phase shifts, 3D metrology, Calibration, Cameras, Projection systems, 3D modeling, Solids, Associative arrays, Phase measurement

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