Dr. Farzin Mirzaagha Profile

Dr. Farzin Mirzaagha

Applications Development Manager at KLA Corp

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Publications (3)

Proceedings Article | 25 October 2007 Paper

Inspection results for 32nm logic and sub-50nm half-pitch memory reticles using the TeraScanHR

Jean-Paul Sier, William Broadbent, Farzin Mirzaagha, Paul Yu

Proceedings Volume 6730, 67302A (2007) https://doi.org/10.1117/12.747295

KEYWORDS: Inspection, Reticles, Databases, Defect detection, SRAF, 3D modeling, Data modeling, Logic, Image transmission, Optical proximity correction

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Proceedings Article | 20 October 2006 Paper

High-resolution mask inspection in advanced fab

Stephanie Maelzer, Andre Poock, Bryan Reese, Kaustuve Bhattacharyya, Farzin Mirzaagha, Stephen Cox, Michael Lang

Proceedings Volume 6349, 63490S (2006) https://doi.org/10.1117/12.686402

KEYWORDS: Inspection, Reticles, Semiconducting wafers, Photomasks, Wafer inspection, Metals, Defect inspection, Lithography, Image transmission, Visualization

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Proceedings Article | 4 November 2005 Paper

Process window impact of progressive mask defects: its inspection and disposition techniques (go/no-go criteria) via a lithographic detector

Jerry Huang, Lan-Hsin Peng, Chih-Wei Chu, Kaustuve Bhattacharyya, Ben Eynon, Farzin Mirzaagha, Tony Dibiase, Kong Son, Jackie Cheng, Ellison Chen, Den Wang

Proceedings Volume 5992, 599206 (2005) https://doi.org/10.1117/12.632039

KEYWORDS: Photomasks, Sensors, Inspection, Lithography, Semiconducting wafers, Defect inspection, Defect detection, Crystals, Detector development, Deep ultraviolet

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