Dr. Francesca Campabadal Profile

Dr. Francesca Campabadal

at Ctr Nacional de Microelectrónica

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Author

Publications (2)

Proceedings Article | 1 July 2005 Paper

CMOS degradation effects due to electron beam lithography in smart NEMS fabrication

Francesca Campabadal, Sara Ghatnekar-Nilsson, Gemma Rius, Celeste Fleta, Joan Marc Raf, Eduard Figueras, Jaume Esteve

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.607926

KEYWORDS: Electron beam lithography, Transistors, Electron beams, Nanoelectromechanical systems, Nanolithography, Scanning electron microscopy, CMOS technology, Metals, Oxides, Nanostructures

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Proceedings Article | 24 April 2003 Paper

SOI silicon as structural layer for NEMS applications

Maria Villarroya, Eduard Figueras, Francesc Perez-Murano, Francesca Campabadal, Jaume Esteve, Nuria Barniol

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499010

KEYWORDS: Silicon, Semiconducting wafers, Oxides, Photomasks, Sensors, Aluminum, Nanoelectromechanical systems, Nanofabrication, Etching, Nanolithography

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