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Dr. Francesco Ferrario
at STMicroelectronics SRL
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 20 March 2020 Paper
Photosensitive organic insulator photo-cell monitoring through advanced macro inspection
A. Corno, A. Bordogna, M. Braga, A. Pescalli, F. Ferrario, U. Iessi, P. Canestrari, P. Sharma, M. Salamone, P. Parisi, T. Groos
Proceedings Volume 11325, 113252K (2020) https://doi.org/10.1117/12.2551884
KEYWORDS: Inspection, Manufacturing, Optical lithography, Process control
Proceedings Article | 20 March 2020 Paper
Novel post-lithography macro inspection strategies for advanced legacy fab challenges
A. Bordogna, S. Seminato, A. Corno, A. Beccalli, L. Motta, G. Pistone, F. Ferrario, P. Piacentini, B. Micali, P. Sharma, L. Bouckou, P. Parisi, T. Groos
Proceedings Volume 11325, 113250I (2020) https://doi.org/10.1117/12.2551890
KEYWORDS: Inspection, Lithography, Defect detection, Defect inspection, Manufacturing, Process control
Proceedings Article | 19 September 2018 Paper
CK-MASK semi-manual tool for mask inspection and blowing
Proceedings Volume 10775, 107750E (2018) https://doi.org/10.1117/12.2326607
KEYWORDS: Photomasks, Inspection, Particles, Pellicles, Contamination, Optical inspection, Lithography
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