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Francesco Solazzi
at Fondazione Bruno Kessler
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Publications (2)
Proceedings Article | 5 May 2011 Paper
Modeling of gold microbeams for characterizing MEMS packages
Alessandro Faes, Alena Repchankova, Francesco Solazzi, Benno Margesin
Proceedings Volume 8066, 80660Z (2011) https://doi.org/10.1117/12.887571
KEYWORDS: Microelectromechanical systems, Gold, Packaging, Finite element methods, Optical simulations, Capacitance, Resonators, Bridges, Capacitors, Sensors
Proceedings Article | 5 May 2011 Paper
Modeling and characterization of a circular-shaped energy scavenger in MEMS surface micromachining technology
F. Solazzi, J. Iannacci, A. Faes, F. Giacomozzi, B. Margesin, A. Tazzoli, G. Meneghesso
Proceedings Volume 8066, 806614 (2011) https://doi.org/10.1117/12.887559
KEYWORDS: Capacitance, Finite element methods, Electrodes, Microelectromechanical systems, Capacitors, Micromachining, Surface micromachining, Manufacturing, Vibrometry, Systems modeling
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