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Frank Eggenstein
at Helmholtz-Zentrum Berlin
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 7 September 2017 Paper
Investigation of HF-plasma-treated soft x-ray optical elements
F. Eggenstein, M. Krivenkov, I. Rudolph, M. Sertsu, A. Sokolov, A. Varykhalov, J. Wolf, T. Zeschke, F. Schäfers
Proceedings Volume 10385, 1038505 (2017) https://doi.org/10.1117/12.2272967
KEYWORDS: Carbon, Metrology, X-rays, X-ray optics, Optical components, Contamination, Reflectometry, Synchrotron radiation, Scanning tunneling microscopy, Reflectivity
Proceedings Article | 5 September 2014 Paper
A reflectometer for at-wavelength characterization of XUV-reflection gratings
F. Eggenstein, P. Bischoff, A. Gaupp, F. Senf, A. Sokolov, T. Zeschke, F. Schäfers
Proceedings Volume 9206, 920607 (2014) https://doi.org/10.1117/12.2061828
KEYWORDS: Reflectometry, Mirrors, Sensors, Polarization, Extreme ultraviolet, Monochromators, Metrology, Optical components, LabVIEW, Reflectivity
Proceedings Article | 5 September 2014 Paper
An XUV optics beamline at BESSY II
A. Sokolov, F. Eggenstein, A. Erko, R. Follath, S. Künstner, M. Mast, J. Schmidt, F. Senf, F. Siewert, T. Zeschke, F. Schäfers
Proceedings Volume 9206, 92060J (2014) https://doi.org/10.1117/12.2061778
KEYWORDS: Mirrors, Reflectometry, Monochromators, Metrology, Sensors, Extreme ultraviolet, Diffraction gratings, Reflectivity, Optical components, Collimation
Proceedings Article | 3 November 1997 Paper
Experimental determination of the diffraction efficiency and high-order suppression of gratings for synchrotron radiation
Uwe Flechsig, F. Eggenstein, Rolf Follath, Friedmar Senf
Proceedings Volume 3150, (1997) https://doi.org/10.1117/12.279368
KEYWORDS: Monochromators, Diffraction gratings, Diffraction, Synchrotron radiation, Energy efficiency, Sensors, Phase modulation, Transmittance, Optical design, Data modeling
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