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For this purpose, our requirements are driven by a Digital-Micromirror-Device-based (DMD) MOS instrument to be mounted on the Telescopio Nazionale Galileo (TNG) and called BATMAN. The two-arm instrument is providing in parallel imaging and spectroscopic capabilities. The objects/field selector is a 2048 x 1080 micromirrors DMD, placed at the focal plane of the telescope; it is used as a programmable multi-slit mask at the entrance of the spectrograph. The compact Offner-type spectrograph design contains a low density convex grating to disperse light. For optimization of the spectrograph efficiency, this convex grating must be blazed.
A blazed reflective grating has been designed with a period of 3300 nm and a blaze angle of 5.04°, and fabricated into convex substrates with 225 mm radius of curvature and a footprint diameter of 63.5 mm. The blaze is optimized for the center wavelength of 580 nm within the spectral range of 400 – 800 nm. Convex blazed gratings have been fabricated and coated with protected silver, with a final 5.7° blaze angle over the whole surface. Efficiency close to 90% on the 1st diffraction order at 700nm has been obtained.
This new type of non-planar reflective gratings will be the key component for future high throughput spectrographs in space missions.
In order to measure the surface shape and the deformation parameters during operation of these devices, a high-resolution Twyman-Green interferometer has been developed. Measurements have been done on a tiltable micro-mirror (170*100μm2) designed by LAM-LAAS and realized by an American foundry, and also on an OKO deformable mirror (15mm diameter). Static characterization is made by phase shifting interferometry and dynamic measurements have been made by quantitative time-averaged interferometry. The OKO mirror has an actuator stroke of 370±10nm for 150V applied and its resonant frequency is 1170±50 Hz, and the tiltable mirror has a rotation cut-off frequency of 31±3 kHz.
The proposed way to tune the output beam is to use the diffraction effect with the so-called PMDG (Programmable Micro Diffraction Gratings ) diffractive MEMS. In that case, small moving structures can form programmable gratings, diffracting or not the incoming light.
In the proposed concept, the MOEMS is placed in the focal plane of a first diffracting stage (using a grating for instance). With such implementation, the MOEMS component can be used to select some wavelengths (for instance by reflecting them) and to switch-off the others (for instance by diffracting them). A second diffracting stage is used to recombine the beam composed by all the selected wavelengths. It becomes then possible to change and adjust the filter in λ and Δλ.
This type of implementation is very interesting for space applications (Astronomy, Earth observation, planetary observation). Firstly because it becomes possible to tune the filtering function quasi instantaneously. And secondly because the focal plane dimension can be reduced to a single detector (for application without field of view) or to a linear detector instead of a 2D matrix detector (for application with field of view) thanks to a sequential acquisition of the signal.
The first concept is a programmable slit for straylight control for space spectro-imagers. This instrument is a push-broom spectroimager for which some images cannot be exploited because of bright sources in the field-of-view. The proposed concept consists in replacing the current entrance spectrometer slit by an active row of micro-mirrors. The MEMS will permit to dynamically remove the bright sources and then to obtain a field-of-view with an optically enhanced signal-to-noise ratio.
The second concept is a push-broom imager for which the acquired spectrum can be tuned by optical MEMS. This system is composed of two diffractive elements and a digital mirror array. The first diffractive element spreads the spectrum. A micromirror array is set at the location of the spectral focal plane. By putting the micro-mirrors ON or OFF, we can select parts of field-of-view or spectrum. The second diffractive element then recombines the light on a push-broom detector. Dichroics filters, strip filter, band-pass filter could be replaced by a unique instrument.
Visitech is an engineering company experienced in developing DMD solution for industrial customers. The Laboratoire d’Astrophysique de Marseille (LAM) has, over several years, developed different tools for modeling and characterization of MOEMS-based slit masks, especially during the design studies on JWSTNIRSpec [6,7]. ESA has engaged with Visitech and LAM in a technical assessment of using a Digital Micromirror Devices (DMD) from Texas Instruments for space applications (for example in ESA EUCLID mission). The DMD features 2048 x 1080 mirrors on a 13.68μm mirror pitch (left-hand side of Fig. 1). Typical operational parameters of this device are room temperature, atmospheric pressure and mirrors switching thousands of times in a second, while for MOS applications in space, the device should work in vacuum, at low temperature, and each MOS exposure would last for typically 1500s with micromirrors held in a static state (either ON or OFF) during that duration. A specific thermal / vacuum test chamber has been developed for test conditions down to -40°C at 10-5 mbar vacuum. Imaging capability for resolving each micro-mirror has also been developed for determining any single mirror failure. Dedicated electronics and software allows us to hold any pattern on the DMD for duration of up to 1500s.
We present the summary of this ESA study, the electronic test vehicle as well as the cold temperature test set-up we have developed. Then, results of tests in vacuum at low temperature, including low temperature stress test, low temperature nominal test, thermal cycling, and life test are presented. Results after radiation (TID and proton), and vibration and shock are also shown.
We are engaged in a European development of micromirror arrays (MMA) for generating reflective slit masks in future MOS, called MIRA. The 100 x 200 μm2 micromirrors are electrostatically tilted providing a precise angle. The main requirements are cryogenic environment capabilities, precise and uniform tilt angle over the whole device, uniformity of the mirror voltage-tilt hysteresis and a low mirror deformation.
A first MMA with single-crystal silicon micromirrors was successfully designed, fabricated and tested. A new generation of micromirror arrays composed of 2048 micromirrors (32 x 64) and modelled for individual addressing were fabricated using fusion and eutectic wafer-level bonding. These micromirrors without coating show a peak-to-valley deformation less than 10 nm, a tilt angle of 24° for an actuation voltage of 130 V. Individual addressing capability of each mirror has been demonstrated using a line-column algorithm based on an optimized voltage-tilt hysteresis. Devices are currently packaged, wire-bonded and integrated to a dedicated electronics to demonstrate the individual actuation of all micromirrors on an array. An operational test of this large array with gold coated mirrors has been done at cryogenic temperature (162 K): the micromirrors were actuated successfully before, during and after the cryogenic experiment. The micromirror surface deformation was measured at cryo and is below 30 nm peak-to-valley.
A promising possible solution is the use of MOEMS devices such as micromirror arrays (MMA) [1,2,3] or micro-shutter arrays (MSA) [4]. MMAs are designed for generating reflecting slits, while MSAs generate transmissive slits. In Europe an effort is currently under way to develop single-crystalline silicon micromirror arrays for future generation infrared multi-object spectroscopy (collaboration LAM / EPFL-CSEM) [5,6]. By placing the programmable slit mask in the focal plane of the telescope, the light from selected objects is directed toward the spectrograph, while the light from other objects and from the sky background is blocked. To get more than 2 millions independent micromirrors, the only available component is a Digital Micromirror Device (DMD) chip from Texas Instruments (TI) that features 2048 x 1080 mirrors and a 13.68μm pixel pitch. DMDs have been tested in space environment (-40°C, vacuum, radiations) by LAM and no showstopper has been revealed [7].
We are presenting in this paper a DMD-based spectrograph called BATMAN, including two arms, one spectroscopic channel and one imaging channel. This instrument is designed for getting breakthrough results in several science cases, from high-z galaxies to nearby galaxies and Trans-Neptunian Objects of Kuiper Belt.
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