Mr. Gangmin Cho Profile

Gangmin Cho

at KAIST

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Author

Publications (7)

Proceedings Article | 25 April 2024 Presentation + Paper

A fast and accurate PEB simulation through recurrent neural network

Gangmin Cho, Taeyoung Kim, Seohyun Kim, Youngsoo Shin

Proceedings Volume 12954, 129540G (2024) https://doi.org/10.1117/12.3010292

KEYWORDS: Palladium, Systems modeling, Quenching, Photoresist materials, Neural networks, Fused deposition modeling, Machine learning, Lithography, Education and training, Process modeling

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Proceedings Article | 28 April 2023 Paper

Fast and accurate prediction of process variation band with custom kernels extracted from convolutional networks

Gangmin Cho, Taeyoung Kim, Youngsoo Shin

Proceedings Volume 12495, 124951Z (2023) https://doi.org/10.1117/12.2658307

KEYWORDS: Lithography, Simulations, Semiconducting wafers, Wafer-level optics, Calibration, Printing, Convolution, Linear regression, Convolutional neural networks, Computational lithography

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Proceedings Article | 28 April 2023 Poster + Paper

Optical proximity correction with PID control through reinforcement learning

Taeyoung Kim, Gangmin Cho, Youngsoo Shin

Proceedings Volume 12495, 1249524 (2023) https://doi.org/10.1117/12.2658484

KEYWORDS: Optical proximity correction, Lithography, Semiconducting wafers, Feature extraction, Bias correction, Adaptive control

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Proceedings Article | 26 May 2022 Presentation + Paper

Hotspot pattern synthesis using generative network with hotspot probability model

Byungho Choi, Gangmin Cho, Yonghwi Kwon, Youngsoo Shin

Proceedings Volume 12052, 120520M (2022) https://doi.org/10.1117/12.2614346

KEYWORDS: Convolution, Lithography, Deconvolution, Systems modeling, Photomasks, Machine learning, Image restoration, Distance measurement

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Proceedings Article | 26 May 2022 Presentation + Paper

Refragmentation through machine learning classifier for fast and accurate optical proximity correction

Gangmin Cho, Yonghwi Kwon, Taeyoung Kim, Youngsoo Shin

Proceedings Volume 12052, 120520S (2022) https://doi.org/10.1117/12.2614339

KEYWORDS: Optical proximity correction, Photomasks, Machine learning, Lithography, Convolution, Principal component analysis, Feature extraction

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Proceedings Article | 15 March 2021 Presentation + Paper

Test pattern extraction for lithography modeling under design rule revisions

Gangmin Cho, Yonghwi Kwon, Pervaiz Kareem, Sungho Kim, Youngsoo Shin

Proceedings Volume 11613, 116130O (2021) https://doi.org/10.1117/12.2583916

KEYWORDS: Lithography, Optical spheres

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Proceedings Article | 12 March 2021 Presentation + Paper

Fast prediction of process variation band through machine learning models

Pervaiz Kareem, Yonghwi Kwon, Gangmin Cho, Youngsoo Shin

Proceedings Volume 11613, 1161306 (2021) https://doi.org/10.1117/12.2583805

KEYWORDS: Machine learning, Lithography, Photomasks, Image segmentation, Source mask optimization, Process modeling, Manufacturing, Image resolution, Deconvolution, Convolution

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Showing 5 of 7 publications

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