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Goran Milinkovic
at ASML Netherlands B.V.
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Publications (1)
Proceedings Article | 6 June 2023 Paper
EUV impact on silicon and carbon etching versus deposition
E. Kurganova, G. Milinkovic, I. Bolk, R. van Lent, M. van de Kerkhof
Proceedings Volume 12578, 125780E (2023) https://doi.org/10.1117/12.2665932
KEYWORDS: Silicon, Extreme ultraviolet, Carbon, Ruthenium, Extreme ultraviolet lithography, Hydrogen, Etching, Electrons, Contamination, Plasma
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