Mr. S. Gowrishankar Profile

S. Gowrishankar

Research Scholar

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 15 October 2012 Paper

Fabrication of p-ZnO thin films by ZrN codoping

S. Gowrishankar, L. Balakrishnan, N. Gopalakrishnan

Proceedings Volume 8484, 84840W (2012) https://doi.org/10.1117/12.929754

KEYWORDS: Zinc oxide, Thin films, Zirconium, Doping, Zinc, Sputter deposition, Nitrogen, Sapphire, Ions, Crystals

Read Abstract +

An attempt has been made to fabricate p-ZnO by direct doping (codoping) of ZrN into ZnO thin films. The ZrN codoped ZnO (ZNZO) thin films of different concentrations (ZrN= 1, 2 and 4 mol %) have been grown on sapphire substrates by RF magnetron sputtering. The grown films have been characterized by X-ray diffraction (XRD), Hall effect measurement, photoluminescence (PL) and time-of-flight secondary-ion mass spectroscopy (ToF SIMS) analysis. XRD studies reveal that all the films are preferentially oriented along (002) plane. The Hall measurement showed that 1 and 2 mol% ZNZO films exhibit n-type conductivity due to the insufficient amount of nitrogen incorporation. However, 4 mol% ZNZO film showed p-type conduction as the sufficient amount of nitrogen has been incorporated into the film. The resistivity and hole concentration of the fabricated p-ZnO have been found as (1.92×10-1 Ωcm) and (2.76 x 10¹⁸ cm^{- 3}) respectively. The red shift in near-band-edge emission observed from PL evidenced the formation of p-conductivity in ZNZO films. The obtained p-conductivity has been well supported by XRD and PL studies. The presence of dopant in the film has been confirmed by ToF-SIMS depth profile analysis.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years