Dr. Guangyu Xu Profile

Dr. Guangyu Xu

Senior Materials Engineer

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Publications (2)

Proceedings Article | 11 June 1999 Paper

Impact of photoacid generator structure on DUV resist performance

James Cameron, Sheri Ablaza, Guangyu Xu, Wang Yueh

Proceedings Volume 3678, (1999) https://doi.org/10.1117/12.350268

KEYWORDS: Lithography, Deep ultraviolet, Diffusion, Prototyping, Absorbance, Chromophores, Chemistry, Image resolution, Electroluminescence, Photoresist processing

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Proceedings Article | 8 April 1998 Paper

Megahertz bandwidth AlxGa1-xN/GaN-based p-i-n detectors

Gary Smith, Michael Estes, Tuoc Dang, Arnel Salvador, Zhifang Fan, Guangyu Xu, Andrei Botchkarev, Hadis Morkoc, P. Wolf

Proceedings Volume 3287, (1998) https://doi.org/10.1117/12.304482

KEYWORDS: Sensors, Gallium nitride, Ultraviolet detectors, Aluminum, Ultraviolet radiation, Sapphire, Gallium, Silicon, Signal detection, Analytical research

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