KEYWORDS: Near field optics, Near field scanning optical microscopy, Near field, Surface roughness, Spatial frequencies, Surface finishing, Scattering, Polarization, Prototyping, Iridium
In mass metrology, the stability of weights, such as standard kilograms, has always been a major concern. Models have been used to describe the various factors that affect mass stability. Surface quality is one important factor that can include the amount and type of pollution present on the surface. However, another important factor is surface roughness. Methods for determining surface roughness differ in their lateral and height resolution and also by the type of information that each method provides, such as: profile, image of defects, power-spectral-density, surface auto-correlation function, or different statistical parameters such as the root-mean-square (rms) height (or roughness) δ.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.