Mr. Harry Ku Profile

Harry Ku

at Taiwan Semiconductor Manufacturing Co Ltd

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Author

Publications (2)

Proceedings Article | 26 August 2024 Paper

Make a core engine ready to empower high quality multi-beam mask writer for N2 node and beyond

Patrick P. Lee, Peter J. Chang, Frankie F. Tsai, Harry C. Ku, Min-Da Cheng, Joey J. Wang, M. J. Lii, Jacqueline Atanelov, Anh-Dai Dang, Samuel Kvasnica

Proceedings Volume 13177, 131770T (2024) https://doi.org/10.1117/12.3032467

KEYWORDS: Microelectromechanical systems, Inspection, Fabrication, Photomasks

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Proceedings Article | 4 December 2023 Presentation + Paper

A core engine to enable high quality multi-beam mask writers for 2nm node and beyond

Patrick P. Lee, Frankie F. Tsai, Harry C. Ku, Min-Da Cheng, Joey J. Wang, Peter J. Chang, M. Lii, Jacqueline Atanelov, Anh-Dai Dang, Samuel Kvasnica

Proceedings Volume PC12751, PC127510S (2023) https://doi.org/10.1117/12.2688300

KEYWORDS: Telecommunications, Optical proximity correction, Microelectromechanical systems, Optics manufacturing, Optical communications, Electrodes, Data communications, CMOS technology, CMOS devices

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