Mr. Hsiang Jen Yang Profile

Hsiang Jen Yang

at Taiwan Mask Corp.

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Publications (3)

Proceedings Article | 22 November 2023 Poster

The process-footprint and density-dependent errors correction of laser mask pattern generator with software-based data path for cd uniformity improvement

Hsiang Jen Yang, Po-Sheng Wang, Yen-Hao Chen, Sheng-Hsin Sun, Ting-Ching Hu, Chia-Wei Lin, Lance Lin

Proceedings Volume PC12751, PC127510X (2023) https://doi.org/10.1117/12.2687188

KEYWORDS: Critical dimension metrology, Beam path, Error control coding, Photoresist materials, Integration, Etching, Design and modelling

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Proceedings Article | 29 September 2023 Paper

Sidewall angle calculation on CD-SEM metrology

WenWei Lee, HsiangJen Yang, Po-Sheng Wang

Proceedings Volume 12915, 129150O (2023) https://doi.org/10.1117/12.2685008

KEYWORDS: Transmission electron microscopy, Photomasks, 3D modeling, Metrology, 3D metrology, Scanning electron microscopy, 3D image processing, Industry, 3D mask effects, Semiconducting wafers

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Proceedings Article | 16 September 2022 Paper

Enhancement of the proximity and aerial imaging performance of a software-based data path for raster-scanned multi-beam laser writer

Hsiang Jen Yang, Po Sheng Wang, Chun Chieh Han, Yi Min Lin, Wen Wei Lee, Wei Shen Chen

Proceedings Volume 12325, 123250T (2022) https://doi.org/10.1117/12.2640527

KEYWORDS: Photomasks, Raster graphics, Reticles

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