Dr. Huai-Yu Cheng Profile

Dr. Huai-Yu Cheng

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 1 March 2021 Presentation + Paper

L. Buzi, J. Papalia, H. Miyazoe, H.-Y. Cheng, M. Hopstaken, R. Bruce, S. Engelmann

Proceedings Volume 11615, 116150G (2021) https://doi.org/10.1117/12.2581706

KEYWORDS: Plasma, Etching, Chemistry, Switching, Plasma etching, Halogens, Applied physics, Thin films, Semiconductors, Profiling

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Keywords/Phrases