In this work, we present the design parameters and optimization of the nanoscale gap interdigitated electrodes (IDEs) for
hydrogen gas sensing. In order to extract important design parameters and understand the sensor performance, numerical
analysis has been carried out for calculating the electric potential, electrical field and surface charge distribution on the
IDEs. The results show that the strength of the electrical field drops with the increase in distance from IDEs depending
on the gap spacing and finger width of the electrodes. Based on the sensing mechanism of our sensor, the current
distribution inside the sensing film is calculated showing that the thin sensing film could result in fast response due to the
uniform electrical field distribution. Effects of the gap spacing and width on the sensing performance were investigated
numerically. The optimized design of IDEs with 50 nm in gap and 1,000 nm in width shows that the change of electrical
field in the thickness direction is much reduced for a given 120 nm-thick sensing layer on top of the IDEs. It is expected
that this design responds better to hydrogen induced conductivity change on top surface and leads to shorter response
time.
KEYWORDS: 3D displays, Micromirrors, Defense and security, Eye, 3D image processing, Defense systems, 3D vision, Visualization, Optical fabrication, Cameras
We report the design, fabrication, and test of a micromirror-based 3D display system. This real-time and full-color 3D display system has left and right eye views in the forms of both still and motion 3-D scenes, and the viewers were able to fuse the stereo information. Furthermore, we report the design concepts for defense applications of this 3D display system.
We designed and fabricated the first, to the best of our knowledge, micromirror array for autostereoscopic 3D display systems. We conducted the optical and Micro-Electrical- Mechanical-System (MEMS) design concurrently, and fabricated several 20x20 micromirror arrays, with micromirror size of 460x460 microns. Both electrostatic and magnetic actuation methods were used to achieve deflection angles of +/- 0.8 degrees. We used these micromirror arrays with backlit transparencies to build a 2-view (left and right) autostereoscopic 3-D display system.
In this work, a scanning silicon micromirror using a bi- directionally movable magnetic microactuator is designed, fabricated and characterized. Although there have been technical difficulties in realizing bi-directional motion in magnetic MOEMS devices for the lack of a suitable structuring technique for permanent magnet components, we overcome those by using UV-LIGA process of thick CONiMnP alloy films and arrays. Based on this new fabrication technique, hard magnetic films or arrays are directly electroplated on silicon cantilever beams in order to compose moving mirror parts. A micromirror is constructed by combining the beam with an electromagnet. According to the change of current in electromagnets, the micromirrors are deflected either upward or downward depending on the direction of magnetic field generated by the electromagnets. Optical properties of the scanning mirrors are measured by a He-Ne laser beam source with the wavelength of 632.8 nm and an optical power detector. A prototype scanning micromirror shows +/- 60 micrometers deflections at the current of +/- 100 mA. The Gaussian profile of the laser beam is well preserved. The reflectance is above 98 percent for the mirrors coated with aluminum films.
Conference Committee Involvement (1)
Microfluidics, BioMEMS, and Medical Microsystems V
22 January 2007 | San Jose, California, United States
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