Nanostructured Origami 3D Fabrication and Assembly Process is a method of manufacturing 3D nanostructured devices using exclusively 2D micro- and nanofabrication techniques. The origami approach consists of first patterning a large 2D membrane and then folding the membrane along predefined regions to obtain the final 3D configuration. We report on the materials, actuation, and modeling aspects of building an origami structure. Experimental results from fabricated devices as well as future applications of the technique are also presented.
Nanostructured OrigamiTM 3D Fabrication and Assembly Process is a
method of manufacturing 3D nanosystems using exclusively 2D litho tools. The 3D structure is obtained by folding a nanopatterned 2D substrate. We report on the materials, actuation, and modeling aspects of the manufacturing process, and present experimental results from fabricated structures.
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